SCOPUS 정보 검색 플랫폼

Volumn 509, Issue 8, 2011, Pages 3667-3671

A study on crystallization, optical and electrical properties of the advanced ZITO thin films using co-sputtering system

(6) Chen, K J a Hung, F Y a Chang, S J a Chang, S P a Mai, Y C a Hu, Z S a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Co sputtering; Crystallization; ITO; Photoluminescence; ZnO

Indexed keywords

ATOMIC CONCENTRATION; COSPUTTERING; ELECTRICAL PROPERTY; ITO; MULTI-FUNCTIONS; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMITTANCE; OXYGEN GAS; POST ANNEALING; POST-ANNEALING TEMPERATURE; SUBSTRATE TEMPERATURE; THERMAL TREATMENT; TRANSPARENT OXIDES; ZNO;

ANNEALING; CRYSTALLIZATION; ELECTRIC PROPERTIES; ELECTRON MOBILITY; OPACITY; OXIDE FILMS; OXYGEN; PHOTOLUMINESCENCE; THIN FILMS; ZINC OXIDE;

OPTICAL FILMS;

EID: 79551491493 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/j.jallcom.2010.12.155 Document Type: Article

Times cited : (12)

References (40)

1
- 77952692128
- J.K. Kim, J.M. Lee, J.W. Lim, J.H. Kim, and S.J. Yun Jpn. J. Appl. Phys. 49 2010 04DP09
- (2010) Jpn. J. Appl. Phys. , vol.49
- Kim, J.K.¹ Lee, J.M.² Lim, J.W.³ Kim, J.H.⁴ Yun, S.J.⁵

2
- 77951137187
- S.H. Lee, S.H. Han, H.S. Jung, H. Shin, J. Lee, J.H. Noh, S. Lee, I.S. Cho, J.K. Lee, J. Kim, and H. Shin J. Phys. Chem. C 114 2010 7185 7189
- (2010) J. Phys. Chem. C , vol.114 , pp. 7185-7189
- Lee, S.H.¹ Han, S.H.² Jung, H.S.³ Shin, H.⁴ Lee, J.⁵ Noh, J.H.⁶ Lee, S.⁷ Cho, I.S.⁸ Lee, J.K.⁹ Kim, J.¹⁰ Shin, H.¹¹

3
- 77952737035
- N.C. Su, S.J. Wang, C.C. Hung, Y.H. Chen, H.Y. Huang, C.K. Chiang, C.H. Wu, and A. Chin Jpn. J. Appl. Phys. 49 2010 04DA12
- (2010) Jpn. J. Appl. Phys. , vol.49
- Su, N.C.¹ Wang, S.J.² Hung, C.C.³ Chen, Y.H.⁴ Huang, H.Y.⁵ Chiang, C.K.⁶ Wu, C.H.⁷ Chin, A.⁸

4
- 77949456784
- H.C. Chen, M.J. Chen, M.K. Wu, W.C. Li, H.L. Tsai, J.R. Yang, H. Kuan, and M. Shiojiri IEEE J. Quant. Electron. 46 2 2010 265 271
- (2010) IEEE J. Quant. Electron. , vol.46 , Issue.2 , pp. 265-271
- Chen, H.C.¹ Chen, M.J.² Wu, M.K.³ Li, W.C.⁴ Tsai, H.L.⁵ Yang, J.R.⁶ Kuan, H.⁷ Shiojiri, M.⁸

5
- 76049113550
- K. Jang, H. Park, S. Jung, N.V. Duy, Y. Kim, J. Cho, H. Choi, T. Kwon, W. Lee, D. Gong, S. Park, J. Yi, D. Kim, and H. Kim Thin Solid Films 518 2010 2808 2811
- (2010) Thin Solid Films , vol.518 , pp. 2808-2811
- Jang, K.¹ Park, H.² Jung, S.³ Duy, N.V.⁴ Kim, Y.⁵ Cho, J.⁶ Choi, H.⁷ Kwon, T.⁸ Lee, W.⁹ Gong, D.¹⁰ Park, S.¹¹ Yi, J.¹² Kim, D.¹³ Kim, H.¹⁴

6
- 79551483930
- L.W. Ji, C.Z. Wu, C.M. Lin, T.H. Meen, K.T. Lam, S.M. Peng, S.J. Young, and C.H. Liu Jpn. J. Appl. Phys. 49 2010 052201
- (2010) Jpn. J. Appl. Phys. , vol.49 , pp. 052201
- Ji, L.W.¹ Wu, C.Z.² Lin, C.M.³ Meen, T.H.⁴ Lam, K.T.⁵ Peng, S.M.⁶ Young, S.J.⁷ Liu, C.H.⁸

7
- 38649132347
- T. Minami Thin Solid Films 516 2008 1314 1321
- (2008) Thin Solid Films , vol.516 , pp. 1314-1321
- Minami, T.¹

8
- 69849111846
- G.S. Heo, Y. Matsuymoto, I.G. Gim, J.W. Park, K.Y. Kim, and T.W. Kim Solid State Commun. 148 2009 1731 1734
- (2009) Solid State Commun. , vol.148 , pp. 1731-1734
- Heo, G.S.¹ Matsuymoto, Y.² Gim, I.G.³ Park, J.W.⁴ Kim, K.Y.⁵ Kim, T.W.⁶

9
- 70749111017
- G.S. Heo, Y. Matsumoto, I.G. Gim, H.K. Lee, J.W. Park, and T.W. Kim Solid State Commun. 150 2010 223 226
- (2010) Solid State Commun. , vol.150 , pp. 223-226
- Heo, G.S.¹ Matsumoto, Y.² Gim, I.G.³ Lee, H.K.⁴ Park, J.W.⁵ Kim, T.W.⁶

10
- 69249184461
- M.K. Ryu, S. Yang, S.H.K. Park, C.S. Hwang, and J.K. Jeong Appl. Phys. Lett. 95 2009 072104
- (2009) Appl. Phys. Lett. , vol.95 , pp. 072104
- Ryu, M.K.¹ Yang, S.² Park, S.H.K.³ Hwang, C.S.⁴ Jeong, J.K.⁵

11
- 67249086653
- D.H. Lee, S.Y. Han, G.S. Herman, and C.H. Chang J. Mater. Chem. 19 2009 3135 3137
- (2009) J. Mater. Chem. , vol.19 , pp. 3135-3137
- Lee, D.H.¹ Han, S.Y.² Herman, G.S.³ Chang, C.H.⁴

12
- 0344520822
- A.E. Solovjeva, and V.A. Zhdanov Inorg. Mater. 21 1985 957 960
- (1985) Inorg. Mater. , vol.21 , pp. 957-960
- Solovjeva, A.E.¹ Zhdanov, V.A.²

13
- 0037136215
- K. Tominaga, T. Takao, A. Fukushima, T. Moriga, and I. Nakabayashi Vacuum 66 2002 505 509
- (2002) Vacuum , vol.66 , pp. 505-509
- Tominaga, K.¹ Takao, T.² Fukushima, A.³ Moriga, T.⁴ Nakabayashi, I.⁵

14
- 33646540131
- D.S. Liu, C.H. Lin, F.C. Tsai, and C.C. Wu J. Vac. Sci. Technol. A 24 3 2006 694 699
- (2006) J. Vac. Sci. Technol. A , vol.24 , Issue.3 , pp. 694-699
- Liu, D.S.¹ Lin, C.H.² Tsai, F.C.³ Wu, C.C.⁴

15
- 31544443237
- D.S. Liu, C.C. Wu, and C.T. Lee Jpn. J. Appl. Phys. 44 7 2005 5119 5121
- (2005) Jpn. J. Appl. Phys. , vol.44 , Issue.7 , pp. 5119-5121
- Liu, D.S.¹ Wu, C.C.² Lee, C.T.³

16
- 33646899580
- D.S. Liu, C.H. Lin, B.W. Huang, and C.C. Wu Jpn. J. Appl. Phys. 45 4B 2006 3526 3530
- (2006) Jpn. J. Appl. Phys. , vol.45 , Issue.B4 , pp. 3526-3530
- Liu, D.S.¹ Lin, C.H.² Huang, B.W.³ Wu, C.C.⁴

17
- 77949566591
- S.W. Shin, K.U. Sim, J.H. Moon, and J.H. Kim Curr. Appl. Phys. 10 2010 S274 S277
- (2010) Curr. Appl. Phys. , vol.10
- Shin, S.W.¹ Sim, K.U.² Moon, J.H.³ Kim, J.H.⁴

18
- 77949918946
- T. Prasada Rao, M.C. Santhosh Kumar, A. Safarulla, V. Ganesan, S.R. Barman, and C. Sanjeeviraja Physica B 405 2010 2226 2231
- (2010) Physica B , vol.405 , pp. 2226-2231
- Prasada Rao, T.¹ Santhosh Kumar, M.C.² Safarulla, A.³ Ganesan, V.⁴ Barman, S.R.⁵ Sanjeeviraja, C.⁶

19
- 39649120116
- D.S. Liu, C.S. Sheu, C.T. Lee, and C.H. Lin Thin Solid Films 516 2008 3196 3203
- (2008) Thin Solid Films , vol.516 , pp. 3196-3203
- Liu, D.S.¹ Sheu, C.S.² Lee, C.T.³ Lin, C.H.⁴

20
- 67349207385
- Y.H. Kim, K.S. Lee, T.S. Lee, B. Chenog, T.-Y. Seong, and W.M. Kim Appl. Surf. Sci. 255 2009 7251 7256
- (2009) Appl. Surf. Sci. , vol.255 , pp. 7251-7256
- Kim, Y.H.¹ Lee, K.S.² Lee, T.S.³ Chenog, B.⁴ Seong, T.-Y.⁵ Kim, W.M.⁶

21
- 85078388710
- J.S. Hong, S.M. Kim, S.J. Park, H.W. Choi, and K.H. Kim Mol. Cryst. Liq. Cryst. 520 2010 19 27
- (2010) Mol. Cryst. Liq. Cryst. , vol.520 , pp. 19-27
- Hong, J.S.¹ Kim, S.M.² Park, S.J.³ Choi, H.W.⁴ Kim, K.H.⁵

22
- 67349192204
- T. Koida, H. Fujiwara, and M. Kondo Sol. Energy Mater. Sol. Cells 93 2009 851 854
- (2009) Sol. Energy Mater. Sol. Cells , vol.93 , pp. 851-854
- Koida, T.¹ Fujiwara, H.² Kondo, M.³

23
- 77649103806
- H.J. Cho, S.U. Lee, B. Hong, Y.D. Shin, J.Y. Ju, H.D. Kim, M. Park, and W.S. Choi Thin Solid Films 518 2010 2941 2944
- (2010) Thin Solid Films , vol.518 , pp. 2941-2944
- Cho, H.J.¹ Lee, S.U.² Hong, B.³ Shin, Y.D.⁴ Ju, J.Y.⁵ Kim, H.D.⁶ Park, M.⁷ Choi, W.S.⁸

24
- 34547204181
- J.K. Sheu, K.W. Shu, M.L. Lee, C.J. Tun, and G.C. Chi J. Electrochem. Soc. 154 6 2007 H521 H524
- (2007) J. Electrochem. Soc. , vol.154 , Issue.6
- Sheu, J.K.¹ Shu, K.W.² Lee, M.L.³ Tun, C.J.⁴ Chi, G.C.⁵

25
- 34548859816
- G. Gonalves, E. Elangovan, P. Barquinha, L. Pereira, R. Martins, and E. Fortunato Thin Solid films 515 2007 8562 8566
- (2007) Thin Solid Films , vol.515 , pp. 8562-8566
- Gonalves, G.¹ Elangovan, E.² Barquinha, P.³ Pereira, L.⁴ Martins, R.⁵ Fortunato, E.⁶

26
- 77953812882
- K.J. Chen, F.Y. Hung, S.J. Chang, S.J. Young, Z.S. Hu, and S.P. Chang J. Sol-Gel Sci. Technol. 54 2010 347 354
- (2010) J. Sol-Gel Sci. Technol. , vol.54 , pp. 347-354
- Chen, K.J.¹ Hung, F.Y.² Chang, S.J.³ Young, S.J.⁴ Hu, Z.S.⁵ Chang, S.P.⁶

27
- 77952738157
- K.C. Liu, J.R. Tsai, C.S. Li, P.H. Chien, J.N. Chen, and W.S. Feng Jpn. J. Appl. Phys. 49 2010 04DF21
- (2010) Jpn. J. Appl. Phys. , vol.49
- Liu, K.C.¹ Tsai, J.R.² Li, C.S.³ Chien, P.H.⁴ Chen, J.N.⁵ Feng, W.S.⁶

28
- 43049106869
- K.J. Saji, M.K. Jayaraj, K. Nomura, T. Kamiya, and H. Hosono J. Electrochem. Soc. 155 6 2008 H390 H395
- (2008) J. Electrochem. Soc. , vol.155 , Issue.6
- Saji, K.J.¹ Jayaraj, M.K.² Nomura, K.³ Kamiya, T.⁴ Hosono, H.⁵

29
- 77950688996
- K.H. Lee, N.I. Cho, E.J. Yun, and H.G. Nam Appl. Surf. Sci. 256 2010 4241 4245
- (2010) Appl. Surf. Sci. , vol.256 , pp. 4241-4245
- Lee, K.H.¹ Cho, N.I.² Yun, E.J.³ Nam, H.G.⁴

30
- 22344435537
- C.W. Na, S.Y. Bae, and J. Park J. Phys. Chem. B 109 2005 12785 12790
- (2005) J. Phys. Chem. B , vol.109 , pp. 12785-12790
- Na, C.W.¹ Bae, S.Y.² Park, J.³

31
- 38149065828
- D.K. Bhat Nanoscale Res. Lett. 3 2008 31 35
- (2008) Nanoscale Res. Lett. , vol.3 , pp. 31-35
- Bhat, D.K.¹

32
- 79551483745
- M.A. Reshchikov, H. Morkoc, B. Nemeth, J. Nause, J. Xie, B. Hertog, and A. Osinsky Physica B 358 2007 401 402
- (2007) Physica B , vol.358 , pp. 401-402
- Reshchikov, M.A.¹ Morkoc, H.² Nemeth, B.³ Nause, J.⁴ Xie, J.⁵ Hertog, B.⁶ Osinsky, A.⁷

33
- 33746087601
- D.H. Kong, W.C. Choi, Y.S. Shin, J.H. Park, and T.G. Kim J. Korean Phys. Soc. 48 6 2006 1214 1217
- (2006) J. Korean Phys. Soc. , vol.48 , Issue.6 , pp. 1214-1217
- Kong, D.H.¹ Choi, W.C.² Shin, Y.S.³ Park, J.H.⁴ Kim, T.G.⁵

34
- 68149088677
- K.J. Chen, F.Y. Hung, and S.J. Chang J. Nanosci. Nanotechnol. 8 2008 1 5
- (2008) J. Nanosci. Nanotechnol. , vol.8 , pp. 1-5
- Chen, K.J.¹ Hung, F.Y.² Chang, S.J.³

35
- 33750956218
- B. Yao, L.X. Guan, G.Z. Xing, Z.Z. Zhang, B.H. Li, Z.P. Wei, X.H. Wang, C.X. Cong, Y.P. Xie, Y.M. Lu, and D.Z. Shen J. Lumin. 122-123 2007 191 194
- (2007) J. Lumin. , vol.122-123 , pp. 191-194
- Yao, B.¹ Guan, L.X.² Xing, G.Z.³ Zhang, Z.Z.⁴ Li, B.H.⁵ Wei, Z.P.⁶ Wang, X.H.⁷ Cong, C.X.⁸ Xie, Y.P.⁹ Lu, Y.M.¹⁰ Shen, D.Z.¹¹

36
- 0037425195
- B. Guo, Z.R. Qiu, and K.S. Wong Appl. Phys. Lett. 82 14 2003 2290 2292
- (2003) Appl. Phys. Lett. , vol.82 , Issue.14 , pp. 2290-2292
- Guo, B.¹ Qiu, Z.R.² Wong, K.S.³

37
- 77952081414
- S.T. Jean, and Y.C. Her Cryst. Growth Des. 10 5 2010 2014 2110
- (2010) Cryst. Growth Des. , vol.10 , Issue.5 , pp. 2014-2110
- Jean, S.T.¹ Her, Y.C.²

38
- 17044429418
- D.H. Fan, Z.Y. Ning, and M.F. Jiang Appl. Surf. Sci. 245 2005 414 419
- (2005) Appl. Surf. Sci. , vol.245 , pp. 414-419
- Fan, D.H.¹ Ning, Z.Y.² Jiang, M.F.³

39
- 67349279560
- S. Kaleemulla, A. Sivasankar Reddy, S. Uthanna, and P. Sreedhara Reddy J. Alloy. Compd. 479 2009 589 593
- (2009) J. Alloy. Compd. , vol.479 , pp. 589-593
- Kaleemulla, S.¹ Sivasankar Reddy, A.² Uthanna, S.³ Sreedhara Reddy, P.⁴

40
- 77956148618
- K.J. Chen, F.Y. Hung, Y.T. Chen, S.J. Chang, and Z.S. Hu Mater. Trans. 51 2010 1340 1345
- (2010) Mater. Trans. , vol.51 , pp. 1340-1345
- Chen, K.J.¹ Hung, F.Y.² Chen, Y.T.³ Chang, S.J.⁴ Hu, Z.S.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.