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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 7 A, 2005, Pages 5119-5121

A transparent and conductive film prepared by RF magnetron cosputtering system at room temperature

(3) Liu, Day Shan a Wu, Chun Ching a Lee, Ching Ting b

a NATIONAL FORMOSA UNIVERSITY (Taiwan)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Cosputtering; Indium tin oxide; Transparent and conductive film; Zinc oxide

Indexed keywords

ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; THERMAL EFFECTS; ZINC OXIDE;

COSPUTTERING; INDIUM-TIN OXIDE; TRANSPARENT AND CONDUCTIVE FILMS;

THIN FILMS;

EID: 31544443237 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.5119 Document Type: Article

Times cited : (25)

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