Microstructure investigations of indium tin oxide films cosputtered with zinc oxide at room temperature

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 3, 2006, Pages 694-699

  Liu, Day Shan ^a   Lin, Chun Hsing ^a   Tsai, Fu Chun ^a   Wu, Chun Ching ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZINC OXIDE;

COSPUTTERED OXIDE FILMS; INDIUM TIN OXIDE (ITO); REDSHIFT; ZNK IN2 O3+K STRUCTURES;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 33646540131     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2194030     Document Type: Article

References (16)

1. Y. H. Tak, K. B. Kim, H. G. Park, K. H. Lee, and J. R. Lee, Thin Solid Films 411, 12 (2002).
2. D. Vaufrey, M. B. Khalifa, M. P. Besland, J. Tardy, C. Sandu, M. G. Blanchin, and J. A. Roger, Mater. Sci. Eng., C 21, 265 (2002).
3. J. George and C. S. Menon, Surf. Coat. Technol. 132, 45 (2000).
4. H. Izumi, F. O. Adurodija, T. Kaneyoshi, T. Ishihara, H. Yoshioka, and M. Motoyama, J. Appl. Phys. 91, 1213 (2002).
5. T. Minami, T. Kakumu, and S. Takata, J. Vac. Sci. Technol. A 14, 1704 (1996).
6. A. V. Singh, R. M. Mehra, A. V. Singh, and R. M. Mehra, J. Appl. Phys. 90, 5661 (2001).
7. H. M. Kim, S. K. Jung, J. S. Ahn, Y. J. Kang, and K. C. Je, Jpn. J. Appl. Phys., Part 1 42, 223 (2003).
8. T. Minami, H. Kumagai, T. Kakumu, S. Takata, and M. Ishii, J. Vac. Sci. Technol. A 15, 1069 (1997).
9. M. S. Hwang, H. S. Jeong, W. M. Kim, and Y. W. Seo, J. Vac. Sci. Technol. A 21, 1399 (2003).
10. K. Tominaga, H. Fukumoto, K. Kondou, Y. Hayashi, K. Murai, T. Moriga, and I. Nakabayashi, Vacuum 74, 683 (2004).
11. D. S. Liu, C. C. Wu, and C. T. Lee, Jpn. J. Appl. Phys., Part 1 44, 5119 (2005).
12. T. Moriga, T. Okamoto, K. Hiruta, A. Fujiwara, and I. Nakabayashi, J. Solid State Chem. 155, 312 (2000).
13. T. Minami, T. Yamamoto, Y. Toda, and T. Miyata, Thin Solid Films 373, 189 (2000).
14. N. Naghavi, C. Marcel, L. Dupont, A. Rougier, J. B. Leriche, and C. Guery, J. Mater. Chem. 10, 2315 (2000).
15. L. Dupont, C. Maugy, N. Naghavi, C. Guery, and J. M. Tarascon, J. Solid State Chem. 158, 119 (2001).
16. B. Yaglioglu, Y. J. Huang, H. Y. Yeom, and D. C. Paine, Thin Solid Films 496, 89 (2006).