SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 103, Issue 1, 2011, Pages 1-11

Zone plate focused soft X-ray lithography

(2) Leontowich, Adam F G a Hitchcock, Adam P a

a MCMASTER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT WRITE; FOCUSED ELECTRON BEAMS; LATERAL DIMENSION; LOW DOSE; POINT-SPREAD FUNCTION; SOFT X-RAY; ZONE PLATE LENS; ZONE PLATES;

ELECTRON BEAMS; ESTERS; LITHOGRAPHY; OPTICAL INSTRUMENTS; SUN; X RAY LITHOGRAPHY; X RAY MICROSCOPES;

X RAYS;

EID: 79151472590 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-010-6172-4 Document Type: Article

Times cited : (22)

References (56)

1
- 79953029153
- British Patent 565
- W.H.F. Talbot, British Patent 565 (1852)
- (1852)
- Talbot, W.H.F.¹

2
- 0014536777
- 10.1149/1.2412145
- M. Hatzakis 1969 J. Electrochem. Soc. 116 1033 10.1149/1.2412145
- (1969) J. Electrochem. Soc. , vol.116 , pp. 1033
- Hatzakis, M.¹

3
- 70349444916
- 10.1073/pnas.0904004106 2009PNAS.10615549P
- S.-M. Park Y.S. Huh H.G. Craighead D. Erickson 2009 Proc. Natl. Acad. Sci. USA 106 15549 10.1073/pnas.0904004106 2009PNAS..10615549P
- (2009) Proc. Natl. Acad. Sci. USA , vol.106 , pp. 15549
- Park, S.-M.¹ Huh, Y.S.² Craighead, H.G.³ Erickson, D.⁴

4
- 33645530210
- 10.1063/1.1997273 2005ApPhL.87e1101B
- A. Bingham Y. Zhao D. Grischkowsky 2005 Appl. Phys. Lett. 87 051101 10.1063/1.1997273 2005ApPhL..87e1101B
- (2005) Appl. Phys. Lett. , vol.87 , pp. 051101
- Bingham, A.¹ Zhao, Y.² Grischkowsky, D.³

5
- 0001226667
- 10.1007/BF00463495 1982NW.69.520B
- E.W. Becker W. Ehrfeld D. Münchmeyer H. Betz A. Heuberger S. Pongratz W. Glashauser H.J. Michel R.V. Siemens 1982 Naturwissenschaften 69 520 10.1007/BF00463495 1982NW.....69..520B
- (1982) Naturwissenschaften , vol.69 , pp. 520
- Becker, E.W.¹ Ehrfeld, W.² Münchmeyer, D.³ Betz, H.⁴ Heuberger, A.⁵ Pongratz, S.⁶ Glashauser, W.⁷ Michel, H.J.⁸ Siemens, R.V.⁹

6
- 70349665354
- 10.1364/OE.17.017669 2009OExpr.1717669C
- W. Chao J. Kim S. Rekawa P. Fischer E.H. Anderson 2009 Opt. Express 17 17669 10.1364/OE.17.017669 2009OExpr..1717669C
- (2009) Opt. Express , vol.17 , pp. 17669
- Chao, W.¹ Kim, J.² Rekawa, S.³ Fischer, P.⁴ Anderson, E.H.⁵

7
- 0027591042
- 10.1147/rd.373.0299
- A.D. Wilson 1993 IBM J. Res. Dev. 37 299 10.1147/rd.373.0299
- (1993) IBM J. Res. Dev. , vol.37 , pp. 299
- Wilson, A.D.¹

8
- 75649125962
- 10.1021/cr900244n
- D.P. Sanders 2010 Chem. Rev. 110 321 10.1021/cr900244n
- (2010) Chem. Rev. , vol.110 , pp. 321
- Sanders, D.P.¹

9
- 0000130079
- 10.1116/1.590453
- C.W. Gwyn R. Stulen D. Sweeney D. Attwood 1998 J. Vac. Sci. Technol. B 16 3142 10.1116/1.590453
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3142
- Gwyn, C.W.¹ Stulen, R.² Sweeney, D.³ Attwood, D.⁴

10
- 0043078444
- G. Möllenstedt R. Speidel 1960 Phys. Bl. 16 192
- (1960) Phys. Bl. , vol.16 , pp. 192
- Möllenstedt, G.¹ Speidel, R.²

11
- 66149129610
- 10.1126/science.1168996 2009Sci.324.910L
- L. Li R.R. Gattass E. Gershgoren H. Hwang J.T. Fourkas 2009 Science 324 910 10.1126/science.1168996 2009Sci...324..910L
- (2009) Science , vol.324 , pp. 910
- Li, L.¹ Gattass, R.R.² Gershgoren, E.³ Hwang, H.⁴ Fourkas, J.T.⁵

12
- 0003801882
- D. Sayre M. Howells J. Kirz H. Rarback (eds). Springer Berlin
- V.V. Aristov, in X-ray Microscopy II, ed. by D. Sayre, M. Howells, J. Kirz, H. Rarback (Springer, Berlin, 1988)
- (1988) X-ray Microscopy II
- Aristov, V.V.¹

13
- 0018544311
- High-resolution, ion-beam processes for microstructure fabrication
- DOI 10.1116/1.570253
- R.L. Seliger R.L. Kubena R.D. Olney J.W. Ward V. Wang 1979 J. Vac. Sci. Technol. 16 1610 10.1116/1.570253 1979JVST...16.1610S (Pubitemid 10479340)
- (1979) Journal of vacuum science & technology , vol.16 , Issue.6 , pp. 1610-1612
- Seliger, R.L.¹ Kubena, R.L.² Olney, R.D.³ Ward, J.W.⁴ Wang, V.⁵

14
- 79953023699
- 10.1147/rd.115.0520
- A.E. Brennemann A.V. Brown M. Hatzakis A.J. Speth R.F.M. Thornley 1967 IBM J. Res. Dev. 11 520 10.1147/rd.115.0520
- (1967) IBM J. Res. Dev. , vol.11 , pp. 520
- Brennemann, A.E.¹ Brown, A.V.² Hatzakis, M.³ Speth, A.J.⁴ Thornley, R.F.M.⁵

15
- 0014569246
- 1969Optik.29.577S
- G. Schmahl D. Rudolph 1969 Optik 29 577 1969Optik..29..577S
- (1969) Optik , vol.29 , pp. 577
- Schmahl, G.¹ Rudolph, D.²

16
- 84975574724
- 10.1364/AO.15.001883 1976ApOpt.15.1883N
- B. Niemann D. Rudolph G. Schmahl 1976 Appl. Opt. 15 1883 10.1364/AO.15.001883 1976ApOpt..15.1883N
- (1976) Appl. Opt. , vol.15 , pp. 1883
- Niemann, B.¹ Rudolph, D.² Schmahl, G.³

17
- 0344942583
- Interferometer-controlled scanning transmission X-ray microscopes at the Advanced Light Source
- DOI 10.1107/S0909049502017739
- A.L.D. Kilcoyne T. Tyliszczak W.F. Steele S. Fakra P. Hitchcock K. Franck E. Anderson B. Harteneck E.G. Rightor G.E. Mitchell A.P. Hitchcock L. Yang T. Warwick H. Ade 2003 J. Synchrotron Radiat. 10 125 10.1107/S0909049502017739 (Pubitemid 36515751)
- (2003) Journal of Synchrotron Radiation , vol.10 , Issue.2 , pp. 125-136
- Kilcoyne, A.L.D.¹ Tyliszczak, T.² Steele, W.F.³ Fakra, S.⁴ Hitchcock, P.⁵ Franck, K.⁶ Anderson, E.⁷ Harteneck, B.⁸ Rightor, E.G.⁹ Mitchell, G.E.¹⁰ Hitchcock, A.P.¹¹ Yang, L.¹² Warwick, T.¹³ Ade, H.¹⁴

18
- 35348903764
- Soft X-ray spectromicroscopy beamline at the CLS: Commissioning results
- DOI 10.1016/j.nima.2007.08.083, PII S0168900207017652
- K.V. Kaznatcheev Ch. Karunakaran U.D. Lanke S.G. Urquhart M. Obst A.P. Hitchcock 2007 Nucl. Instrum. Methods Phys. Res., Sect. A, Accel. Spectrom. Detect. Assoc. Equip. 582 96 10.1016/j.nima.2007.08.083 2007NIMPA.582...96K (Pubitemid 47592950)
- (2007) Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , vol.582 , Issue.1 , pp. 96-99
- Kaznatcheev, K.V.¹ Karunakaran, Ch.² Lanke, U.D.³ Urquhart, S.G.⁴ Obst, M.⁵ Hitchcock, A.P.⁶

19
- 57049092145
- 10.1063/1.3021472 2008RScI.79k3704R
- J. Raabe G. Tzvetkov U. Flechsig M. Böge A. Jaggi B. Sarafimov M.G.C. Vernooij T. Huthwelker H. Ade D. Kilcoyne T. Tyliszczak R.H. Fink C. Quitmann 2008 Rev. Sci. Instrum. 79 113704 10.1063/1.3021472 2008RScI...79k3704R
- (2008) Rev. Sci. Instrum. , vol.791 , pp. 13704
- Raabe, J.¹ Tzvetkov, G.² Flechsig, U.³ Böge, M.⁴ Jaggi, A.⁵ Sarafimov, B.⁶ Vernooij, M.G.C.⁷ Huthwelker, T.⁸ Ade, H.⁹ Kilcoyne, D.¹⁰ Tyliszczak, T.¹¹ Fink, R.H.¹² Quitmann, C.¹³

20
- 0003920042
- Cambridge University Press Cambridge
- D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation Principles and Applications (Cambridge University Press, Cambridge, 1999)
- (1999) Soft X-rays and Extreme Ultraviolet Radiation Principles and Applications
- Attwood, D.¹

21
- 79953024152
- W. Chao, private communication
- W. Chao, private communication

22
- 0029346240
- 10.1116/1.588175
- X. Zhang C. Jacobsen S. Lindaas S. Williams 1995 J. Vac. Sci. Technol. B 13 1477 10.1116/1.588175
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1477
- Zhang, X.¹ Jacobsen, C.² Lindaas, S.³ Williams, S.⁴

23
- 79955985192
- Direct writing of fluorescent patterns on LiF films by x-ray microprobe
- DOI 10.1063/1.1480107
- R. Larciprete L. Gregoratti M. Danailov R.M. Montereali F. Bonfigli M. Kiskinova 2002 Appl. Phys. Lett. 80 3862 10.1063/1.1480107 2002ApPhL..80.3862L (Pubitemid 34637286)
- (2002) Applied Physics Letters , vol.80 , Issue.20 , pp. 3862
- Larciprete, R.¹ Gregoratti, L.² Danailov, M.³ Montereali, R.M.⁴ Bonfigli, I.⁵ Kiskinova, M.⁶

24
- 33847741075
- Chemically selective soft X-ray patterning of polymers
- DOI 10.1107/S0909049506053829, PII S0909049506053829, ms5003
- J. Wang H.D.H. Stöver A.P. Hitchcock T. Tyliszczak 2007 J. Synchrotron Radiat. 14 181 10.1107/S0909049506053829 (Pubitemid 46370528)
- (2007) Journal of Synchrotron Radiation , vol.14 , Issue.2 , pp. 181-190
- Wang, J.¹ Stover, H.D.H.² Hitchcock, A.P.³ Tyliszczak, T.⁴

25
- 36348968731
- Chemically selective soft X-ray direct-write patterning of multilayer polymer films
- DOI 10.1021/jp072570s
- J. Wang H.D.H. Stöver A.P. Hitchcock 2007 J. Phys. Chem. C 111 16330 10.1021/jp072570s (Pubitemid 350149968)
- (2007) Journal of Physical Chemistry C , vol.111 , Issue.44 , pp. 16330-16338
- Wang, J.¹ Stover, H.D.H.² Hitchcock, A.P.³

26
- 78650087698
- 10.1116/1.3514124
- A.G. Caster S. Kowarik A.M. Schwartzberg S.R. Leone A. Tivanski M.K. Gilles 2010 J. Vac. Sci. Technol. B 28 1304 10.1116/1.3514124
- (2010) J. Vac. Sci. Technol. B , vol.28 , pp. 1304
- Caster, A.G.¹ Kowarik, S.² Schwartzberg, A.M.³ Leone, S.R.⁴ Tivanski, A.⁵ Gilles, M.K.⁶

27
- 0036657957
- 10.1107/S0909049502005502
- T. Warwick H. Ade D. Kilcoyne M. Kritscher T. Tyliszczak S. Fakra A. Hitchcock P. Hitchcock H. Padmore 2002 J. Synchrotron Radiat. 9 254 10.1107/S0909049502005502
- (2002) J. Synchrotron Radiat. , vol.9 , pp. 254
- Warwick, T.¹ Ade, H.² Kilcoyne, D.³ Kritscher, M.⁴ Tyliszczak, T.⁵ Fakra, S.⁶ Hitchcock, A.⁷ Hitchcock, P.⁸ Padmore, H.⁹

28
- 79953027873
- 10.1117/1.2990738
- R.W. Johnstone I.G. Foulds M.V. Pallapa A.M. Parameswaran 2008 J. Micro/Nanolithogr. MEMS MOEMS 7 043006 10.1117/1.2990738
- (2008) J. Micro/Nanolithogr. MEMS MOEMS , vol.7 , pp. 043006
- Johnstone, R.W.¹ Foulds, I.G.² Pallapa, M.V.³ Parameswaran, A.M.⁴

29
- 0011296899
- 10.1007/s005420050107
- A.C. Henry R.L. McCarley S. Das C. Khan Malek D.S. Poche 1998 Microsyst. Technol. 4 104 10.1007/s005420050107
- (1998) Microsyst. Technol. , vol.4 , pp. 104
- Henry, A.C.¹ McCarley, R.L.² Das, S.³ Khan, M.C.⁴ Poche, D.S.⁵

30
- 84989071862
- 10.1049/el:19720074
- D.L. Spears H.I. Smith 1972 Electron. Lett. 8 102 10.1049/el:19720074
- (1972) Electron. Lett. , vol.8 , pp. 102
- Spears, D.L.¹ Smith, H.I.²

31
- 0016535487
- 10.1149/1.2134380
- J.S. Greeneich 1975 J. Electrochem. Soc. 122 970 10.1149/1.2134380
- (1975) J. Electrochem. Soc. , vol.122 , pp. 970
- Greeneich, J.S.¹

32
- 84975367088
- M. Hatzakis 1974 J. Polym. Sci. 23 73
- (1974) J. Polym. Sci. , vol.23 , pp. 73
- Hatzakis, M.¹

33
- 62049084354
- 10.1016/j.elspec.2008.01.002
- J. Wang C. Morin L. Li A.P. Hitchcock A. Scholl A. Doran 2009 J. Electron Spectrosc. Relat. Phenom. 170 25 10.1016/j.elspec.2008.01.002
- (2009) J. Electron Spectrosc. Relat. Phenom. , vol.170 , pp. 25
- Wang, J.¹ Morin, C.² Li, L.³ Hitchcock, A.P.⁴ Scholl, A.⁵ Doran, A.⁶

34
- 0003813442
- 10.1149/1.2401767
- J.S. Greeneich 1974 J. Electrochem. Soc. 121 1669 10.1149/1.2401767
- (1974) J. Electrochem. Soc. , vol.121 , pp. 1669
- Greeneich, J.S.¹

35
- 0023575068
- X-ray projection method using zone plates for mask preparation with sub-micron sizes
- DOI 10.1016/0167-9317(87)90042-6
- R.E. Burge M.T. Browne P. Charalambous 1987 Microelectron. Eng. 6 227 10.1016/0167-9317(87)90042-6 (Pubitemid 18612407)
- (1987) Microelectronic Engineering , vol.6 , Issue.1-4 , pp. 227-232
- Burge, R.E.¹ Browne, M.T.² Charalambous, P.³

36
- 0344121653
- 10.1021/jp0307396
- R. Klauser I.-H. Hong S.-C. Wang M. Zharnikov A. Paul A. Gölzhäuser A. Terfort T.J. Chuang 2003 J. Phys. Chem. B 107 13133 10.1021/jp0307396
- (2003) J. Phys. Chem. B , vol.107 , pp. 13133
- Klauser, R.¹ Hong, I.-H.² Wang, S.-C.³ Zharnikov, M.⁴ Paul, A.⁵ Gölzhäuser, A.⁶ Terfort, A.⁷ Chuang, T.J.⁸

37
- 0010240628
- 10.1116/1.585915
- A.D. Dubner A. Wagner J.P. Levin J. Mauer 1992 J. Vac. Sci. Technol. B 10 3212 10.1116/1.585915
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 3212
- Dubner, A.D.¹ Wagner, A.² Levin, J.P.³ Mauer, J.⁴

38
- 0035302564
- Memory effect on ion beam-induced depolymerization of PMMA
- DOI 10.1016/S0168-583X(00)00571-1, PII S0168583X00005711
- G. Compagnini G.G.N. Angilella A. Raudino O. Puglisi 2001 Nucl. Instrum. Methods Phys. Res., Sect. B, Beam Interact. Mater. Atoms 175-177 559 10.1016/S0168-583X(00)00571-1 (Pubitemid 32528938)
- (2001) Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms , vol.175-177 , pp. 559-563
- Compagnini, G.¹ Angilella, G.G.N.² Raudino, A.³ Puglisi, O.⁴

39
- 0003972070
- 7 Cambridge University Press Cambridge
- M. Born, E. Wolf, Principles of Optics, 7th edn. (Cambridge University Press, Cambridge, 1999)
- (1999) Principles of Optics
- Born, M.¹ Wolf, E.²

40
- 33845250006
- Replication of diffractive-optical arrays via photocurable nanoimprint lithography
- DOI 10.1116/1.2363401
- M.D. Galus E. Moon H.I. Smith R. Menon 2006 J. Vac. Sci. Technol. B 24 2960 10.1116/1.2363401 (Pubitemid 44866448)
- (2006) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.24 , Issue.6 , pp. 2960-2963
- Galus, M.D.¹ Moon, E.² Smith, H.I.³ Menon, R.⁴

41
- 0024048153
- 10.1147/rd.324.0502
- A.N. Broers 1988 IBM J. Res. Dev. 32 502 10.1147/rd.324.0502
- (1988) IBM J. Res. Dev. , vol.32 , pp. 502
- Broers, A.N.¹

42
- 0030231574
- Electron beam lithography - Resolution limits
- DOI 10.1016/0167-9317(95)00368-1
- A.N. Broers A.C.F. Hoole J.M. Ryan 1996 Microelectron. Eng. 32 131 10.1016/0167-9317(95)00368-1 (Pubitemid 126377496)
- (1996) Microelectronic Engineering , vol.32 , Issue.SPEC. ISS. 1-4 , pp. 131-142
- Broers, A.N.¹ Hoole Andrew, C.F.A.C.F.² Ryan, J.M.³

43
- 0018436046
- 10.1002/sia.740010103
- M.P. Seah W.A. Dench 1979 Surf. Interface Anal. 1 2 10.1002/sia.740010103
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dench, W.A.²

44
- 0035971781
- 10.1063/1.1369615 2001ApPhL.78.2760Y
- S. Yasin D.G. Hasko H. Ahmed 2001 Appl. Phys. Lett. 78 2760 10.1063/1.1369615 2001ApPhL..78.2760Y
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2760
- Yasin, S.¹ Hasko, D.G.² Ahmed, H.³

45
- 4944228706
- 10.1116/1.1763897
- W. Hu K. Sarveswaran M. Lieberman G.H. Bernstein 2004 J. Vac. Sci. Technol. B 22 1711 10.1116/1.1763897
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 1711
- Hu, W.¹ Sarveswaran, K.² Lieberman, M.³ Bernstein, G.H.⁴

46
- 0000178728
- 10.1116/1.589996
- E. Lavallée J. Beauvais J. Beerens 1998 J. Vac. Sci. Technol. B 16 1255 10.1116/1.589996
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 1255
- Lavallée, E.¹ Beauvais, J.² Beerens, J.³

47
- 68349151095
- 10.1116/1.3167367
- N. Arjmandi L. Lagae G. Borghs 2009 J. Vac. Sci. Technol. B 27 1915 10.1116/1.3167367
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 1915
- Arjmandi, N.¹ Lagae, L.² Borghs, G.³

48
- 79953028836
- G. Schmahl, D. Rudolph, D. Neimann, in Proc. Eight Int. Conf. on X-ray Optics and Microanalysis, Boston (1977), p. 60A
- (1977) Proc. Eight Int. Conf. on X-ray Optics and Microanalysis Boston
- Schmahl, G.¹ Rudolph, D.² Neimann, D.³

49
- 70249142824
- 10.1103/PhysRevLett.103.110801 2009PhRvL.103k0801R
- S. Heim Rehbein P. Guttmann S. Werner G. Schneider 2009 Phys. Rev. Lett. 103 110801 10.1103/PhysRevLett.103.110801 2009PhRvL.103k0801R
- (2009) Phys. Rev. Lett. , vol.103 , pp. 110801
- Heim, R.S.¹ Guttmann, P.² Werner, S.³ Schneider, G.⁴

50
- 30544432038
- Hard X-ray diffraction-limited nanofocusing with kirkpatrick-baez mirrors
- DOI 10.1143/JJAP.44.L539
- H. Mimura S. Matsuyama H. Yumoto 2005 Jpn. J. Appl. Phys. 44 L539 10.1143/JJAP.44.L539 2005JaJAP..44L.539M (Pubitemid 43078341)
- (2005) Japanese Journal of Applied Physics, Part 2: Letters , vol.44 , Issue.16-19
- Mimura, H.¹ Matsuyama, S.² Yumoto, H.³ Hara, H.⁴ Yamamura, K.⁵ Sano, Y.⁶ Shibahara, M.⁷ Endo, K.⁸ Mori, Y.⁹ Nishlno, Y.¹⁰ Tamasaku, K.¹¹ Yabashi, M.¹² Ishikawa, T.¹³ Yamauchi, K.¹⁴

51
- 0000180640
- 10.1116/1.585978
- C.R.K. Marrian E.A. Dobisz J.A. Dagata 1992 J. Vac. Sci. Technol. B 10 2877 10.1116/1.585978
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2877
- Marrian, C.R.K.¹ Dobisz, E.A.² Dagata, J.A.³

52
- 0000180643
- 10.1116/1.585934
- P.A. Peterson Z.J. Radzimski S.A. Schwalm P.E. Russell 1992 J. Vac. Sci. Technol. B 10 3088 10.1116/1.585934
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 3088
- Peterson, P.A.¹ Radzimski, Z.J.² Schwalm, S.A.³ Russell, P.E.⁴

53
- 21744452342
- Soft X-ray microscopy at a spatial resolution better than 15 nm
- DOI 10.1038/nature03719
- W. Chao B.D. Harteneck J.A. Liddle E.H. Anderson D.T. Attwood 2005 Nature 435 1210 10.1038/nature03719 2005Natur.435.1210C (Pubitemid 40943082)
- (2005) Nature , vol.435 , Issue.7046 , pp. 1210-1213
- Chao, W.¹ Harteneck, B.D.² Liddle, J.A.³ Anderson, E.H.⁴ Attwood, D.T.⁵

54
- 48049084962
- 10.1016/j.micron.2007.09.010
- A.P. Hitchcock J.J. Dynes G. Johansson J. Wang G. Botton 2008 Micron 39 741 10.1016/j.micron.2007.09.010
- (2008) Micron , vol.39 , pp. 741
- Hitchcock, A.P.¹ Dynes, J.J.² Johansson, G.³ Wang, J.⁴ Botton, G.⁵

55
- 0030283999
- 10.1116/1.589044
- H.I. Smith 1996 J. Vac. Sci. Technol. B 14 4318 10.1116/1.589044
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4318
- Smith, H.I.¹

56
- 0343867183
- Zone-plate-array lithography using synchrotron radiation
- DOI 10.1116/1.1321275
- A. Pépin D. Decanini Y. Chen 2000 J. Vac. Sci. Technol. B 18 2981 10.1116/1.1321275 (Pubitemid 32088143)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 2981-2985
- Pepin, A.¹ Decanini, D.² Chen, Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.