Demonstration of 12 nm resolution fresnel zone plate lens based soft X-ray microscopy

Optics Express

Volumn 17, Issue 20, 2009, Pages 17669-17677

  Chao, Weilun ^a   Kim, Jihoon ^b   Rekawa, Senajith ^a   Fischer, Peter ^a   Anderson, Erik H ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOTECHNOLOGY; X RAY MICROSCOPES;

DOUBLE PATTERNING; FIELD TRANSMISSION; FRESNEL ZONE PLATE LENS; HIGH QUALITY; NANOFABRICATION PROCESS; NM RESOLUTION; SOFT X-RAY MICROSCOPY; ZONE PLATES;

PLATES (STRUCTURAL COMPONENTS);

ARTICLE; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; IMAGE QUALITY; INSTRUMENTATION; MICROSCOPY; OPTICAL INSTRUMENTATION; RADIOGRAPHY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY;

COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MICROSCOPY; RADIOGRAPHIC IMAGE ENHANCEMENT; RADIOGRAPHY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY;

EID: 70349665354     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.017669     Document Type: Article

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