Chemically selective soft X-ray direct-write patterning of multilayer polymer films

Journal of Physical Chemistry C

Volumn 111, Issue 44, 2007, Pages 16330-16338

  Wang, Jian ^a   Stöver, Harald D H ^a   Hitchcock, Adam P ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTRA; MULTILAYERS; POLYMETHYL METHACRYLATES; X RAYS;

HIGHLY SELECTIVE PATTERNING; PATTERN REPRODUCTION; SCANNING TRANSMISSION X-RAY MICROSCOPE;

POLYMER FILMS;

EID: 36348968731     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp072570s     Document Type: Article

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