A proposal for maskless, zone-plate-array nanolithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4318-4322

  Smith, Henry I ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BANDWIDTH; DIFFRACTION; FABRICATION; LENSES; PHASE SHIFTERS; SYNCHROTRONS; SYSTEMS ANALYSIS; X RAY LITHOGRAPHY; X RAYS;

FRESNEL ZONE PLATES; MICROMECHANICAL SHUTTERS; ZONE PLATE ARRAY;

NANOTECHNOLOGY;

EID: 0030283999     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589044     Document Type: Article

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