Measured density of copper atoms in the ground and metastable states in argon magnetron discharge correlated with the deposition rate

Journal of Physics D: Applied Physics

Volumn 44, Issue 2, 2011, Pages

  Naghshara, H ^a   Sobhanian, S ^a   Khorram, S ^a   Sadeghi, N ^b  

^a UNIVERSITY OF TABRIZ   (Iran)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION LINE PROFILES; ABSORPTION RATES; ARGON PRESSURE; COPPER ATOMS; COPPER LAYER; DETECTION LIMITS; DISCHARGE POWER; EMISSION SPECTRAL; EXCITATION RATE; FEED GAS; GAS PRESSURES; GAS TEMPERATURE; HOLLOW CATHODE LAMP; HYPERFINE STRUCTURE; LAMP CURRENT; LINE PROFILES; MAGNETRON DISCHARGES; META-STABLE STATE; METASTABLE ATOMS; OPERATING CONDITION; PLASMA VOLUME; QUARTZ MICROBALANCE; RESONANCE ABSORPTION; TOTAL DENSITY;

ABSORPTION; ARGON; COPPER; DC POWER TRANSMISSION; DEPOSITION; DEPOSITION RATES; ELECTRIC DISCHARGES; ELECTRONIC STATES; GAS FUEL PURIFICATION; GROUND STATE; ION BOMBARDMENT; ISOTOPES; LIGHT SOURCES; MAGNETRONS; NITROGEN; PLASMA DENSITY; PLASMA DEPOSITION; QUARTZ;

ATOMS;

EID: 78650656786     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/2/025202     Document Type: Article

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