Nickel atom and ion densities in an inductively coupled plasma with an internal coil

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Xu, Lin ^a   Sadeghi, Nader ^b   Donnelly, Vincent M ^a   Economou, Demetre J ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMIC PHYSICS; CARRIER CONCENTRATION; ELECTRODES; INDUCTIVELY COUPLED PLASMA; IONS;

HIGH-DENSITY PLASMA; NICKEL ATOM DENSITY; NITROGEN ACTINOMETER GAS; ROVIBRATIONAL SPECTRA;

NICKEL COMPOUNDS;

EID: 33846317106     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2401659     Document Type: Article

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