Characterization of high density matrix microwave argon plasmas by laser absorption and electric probe diagnostics

Journal of Physics D: Applied Physics

Volumn 40, Issue 17, 2007, Pages 5177-5186

  Latrasse, L ^a   Sadeghi, N ^b   Lacoste, A ^a   Bes A ^a   Pelletier, J ^a  

^a UNIVERSITÉ JOSEPH FOURIER GRENOBLE 1   (France)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC FIELDS; IONIZATION; LANGMUIR PROBES; LASER SPECTROSCOPY; MAGNETIC FIELDS; MICROWAVES;

DENSITY MATRIX MICROWAVE ARGON PLASMAS; LASER DIODE ABSORPTION SPECTROSCOPY; METASTABLES; PLANAR MATRIX CONFIGURATION; PLASMA POTENTIAL;

PLASMA SOURCES;

EID: 34548662858     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/17/024     Document Type: Article

References (17)

1. Lacoste A, Lagarde T, Béchu S, Arnal Y and Pelletier J 2002 Multi-dipolar plasmas for uniform processing: physics, design and performance Plasma Sources Sci. Technol. 11 407-12
2. Latrasse L, Lacoste A, Bès A and Pelletier J 2007 High density distributed microwave plasma sources in matrix configuration: concept, design and performance Plasma Sources Sci. Technol. 16 7-12
3. Sadeghi N 2004 Molecular spectroscopy techniques applied for processing plasma diagnostics J. Plasma Fusion Res. 80 767-76
4. Wiese W L, Brault J W, Danzmann K, Helbig V and Kock M 1989 Unified set of atomic transition probabilities for neutral argon Phys. Rev. A 39 2461-71
5. Penache C, Miclea M, Bräuning-Demian A, Hohn O, Schössler S, Jahnke T, Niemax K and Schmidt-Böcking H 2002 Characterization of a high-pressure microdischarge using diode laser atomic absorption spectroscopy Plasma Sources Sci. Technol. 11 476-83
6. Moisan M and Pelletier J 2006 Physique des Plasmas collisionnels EDP Sciences, Collection Grenoble Sciences pp 190-7
7. Chen F F and Arnush D 2001 The floating potential of cylindrical Langmuir probes Phys. Plasmas 8 5051-2
8. Moisan M and Pelletier J 2006 Physique des Plasmas collisionnels EDP Sciences, Collection Grenoble Sciences pp 217-9
9. Clarenbach B, Lorenz B, Krämer M and Sadeghi N 2003 Time-dependent gas density and temperature measurements in pulsed helicon discharges in Ar Plasma Sources Sci. Technol. 12 345-57
10. Engeln R, Mazouffre S, Vankan P, Schram D C and Sadeghi N 2001 Flow dynamics and invasion by background gas of a supersonically expanding thermal plasma Plasma Sources Sci. Technol. 10 595-605
11. Moisan M and Pelletier J 2006 Physique des Plasmas collisionnels EDP Sciences, Collection Grenoble Sciences pp 358-63
12. Castãos Martinez E, Kabouzi Y, Makasheva K and Moisan M 2004 Modeling of microwave-sustained plasmas at atmospheric pressure with application to discharge contraction Phys. Rev. E 70 066405-1-12
13. Kolts J H and Setser D W 1978 Decay rates of Ar, Kr, and Xe metastable atoms J. Chem. Phys. 68 4848-59
14. Lymberopoulos D P and Economou D J 1993 Fluid simulation of glow discharges: Effect of metastable atoms in argon J. Appl. Phys. 73 3668-79
15. 1 excited states in an inductively coupled RF plasma J. Phys. D: Appl. Phys. 38 2769-77
16. Ellis E and Twiddy N D 1969 Time-resolved optical absorption measurements of excited atom concentrations in the argon afterglow J. Phys. B: At. Mol. Phys. 2 1366-77
17. Hyman H A 1979 Electron-impact ionization cross sections for excited states of the rare gases (Ne, Ar, Kr, Xe), cadmium and mercury Phys. Rev. A 20 855-9