Plasma parameters in a planar dc magnetron sputtering discharge of argon and krypton

Journal of Physics: Conference Series

Volumn 100, Issue PART 6, 2008, Pages

  Sigurjonsson, P ^a   Gudmundsson, J T ^a  

^a UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRON TEMPERATURE; ELECTRONS; HOT ELECTRONS; MAGNETRON SPUTTERING; PLASMA DEVICES; ARGON; KRYPTON; NANOSCIENCE;

ARGON DISCHARGES; COLD ELECTRONS; DC MAGNETRON SPUTTERING; DISCHARGE PRESSURES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; INCREASED DISCHARGES; PLASMA PARAMETER;

ELECTRIC DISCHARGES;

EID: 77954325738     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/6/062018     Document Type: Conference Paper

References (11)

1. Waits R K 1978 J. Vac. Sci. Technol. 15 179
2. Rossnagel S M, Kaufman H R 1986 J. Vac. Sci. Technol. A 4 1822
3. Sheridan T E, Goeckner M J, Goree J. 1991 J. Vac. Sci. Technol. A 9 688
4. Spolaore M, Antoni V, Bagatin M, Buffa A, Cavazzana R, Desideri D, Martines E, Pomaro N, Serianni G, Tramontin L 1999 Surf. Coat. Technol. 116-119 1083
5. Field D J, Dew S K, Burrell R E 2002 J. Vac. Sci. Technol. A 20 2032
6. Seo S H, In J H, Chang H Y 2004 Plasma Sources Sci. Technol. 13 409
7. Magnus F, Gudmundsson J T 2002 Technical Report RH-20-02, Science Institute, University of Iceland
8. Lieberman M A, Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing 2nd ed. (New York, New York: John Wiley & Sons)
9. Kagan Y M, Perel V I 1964 Sov. Phys. Uspekhi 6 767
10. Seo S H, Chang H Y 2004 J. Appl. Phys. 96 1310
11. Kannari F, Obara M, Fujioka 1985 J. Appl. Phys. 57 4309