Are dominant sputtering products from metal targets really monatomic?

Vacuum

Volumn 83, Issue 3, 2008, Pages 463-466

  Sasaki, K ^a   Nafarizal, N ^a   Gao, J S ^a   Shibagaki, K ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b SUZUKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Clusters; Density distribution; Gas phase production; Laser induced fluorescence imaging spectroscopy; Magnetron sputtering discharge; Sputtering products

Indexed keywords

ATOMIC PHYSICS; ATOMS; CHLORINE COMPOUNDS; DIMERS; METAL IONS; METALLIZING; METALS; OLIGOMERS; TARGETS;

CLUSTERS; DENSITY DISTRIBUTION; EXPERIMENTAL OBSERVATIONS; GAS-PHASE PRODUCTION; LASER-INDUCED FLUORESCENCE IMAGING SPECTROSCOPY; MAGNETRON SPUTTERING DISCHARGE; METAL ATOMS; METAL TARGETS; SPUTTERING PRODUCTS;

MAGNETRON SPUTTERING;

EID: 52949151530     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.007     Document Type: Article

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