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Review of Scientific Instruments

Volumn 81, Issue 1, 2010, Pages

Velocity distribution function of sputtered Cu atoms obtained by time resolved optical absorption spectroscopy

(4) Kang, Namjun a,b Oh, Soo Ghee c Gaboriau, Freddy a,b Ricard, André a,b

a Laboratoire Plasma et Conversion d'Energie (France)

b CNRS (France)

c Ajou University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE VELOCITY; COPPER ATOMS; CU ATOMS; FIRST ORDER; MAGNETRON PLASMAS; ON TIME; OPTICAL ABSORPTION SPECTROSCOPY; RADIAL VELOCITY; SHORT PULSE; SPUTTERED ATOMS; TARGET SURFACE; TIME EVOLUTIONS; TIME VARIATIONS; TIME-RESOLVED;

ABSORPTION; ABSORPTION SPECTROSCOPY; ATOMIC SPECTROSCOPY; ATOMS; ELECTRIC DISCHARGES; KINETIC THEORY OF GASES; LIGHT ABSORPTION; PLASMAS; SPUTTERING; TARGETS; VELOCITY; VELOCITY CONTROL; VELOCITY DISTRIBUTION;

DISTRIBUTION FUNCTIONS;

EID: 75749150219 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3284528 Document Type: Review

Times cited : (10)

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