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Volumn 39, Issue 7, 2006, Pages 1413-1421
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3D numerical simulation of gas heating effects in a magnetron sputter deposition system
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
COMPUTER SIMULATION;
COPPER;
GAS HEATING;
MAGNETRON SPUTTERING;
GAS TEMPERATURE;
MAGNETRON SPUTTER DEPOSITION;
TEMPERATURE PROFILE;
SPUTTER DEPOSITION;
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EID: 33645062416
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/39/7/012 Document Type: Article |
Times cited : (19)
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References (23)
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