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Volumn 39, Issue 7, 2006, Pages 1413-1421

3D numerical simulation of gas heating effects in a magnetron sputter deposition system

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; COPPER; GAS HEATING; MAGNETRON SPUTTERING;

EID: 33645062416     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/7/012     Document Type: Article
Times cited : (19)

References (23)
  • 3
    • 0002312302 scopus 로고
    • 10.1016/0040-6090(78)90273-0 0040-6090
    • Thornton J A 1978 Thin Solid Films 54 23
    • (1978) Thin Solid Films , vol.54 , Issue.1 , pp. 23
    • Thornton, J.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.