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Surface and Coatings Technology

Volumn 205, Issue 8-9, 2011, Pages 3080-3086

Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering

(5) Liu, D G a Tu, J P a Zhang, H a Chen, R a Gu, C D a

a ZHEJIANG UNIVERSITY (China)

Author keywords

Bilayer period; Carbon nitride; Multilayer; Scratch; Surface profile

Indexed keywords

BILAYER PERIOD; C-SI SUBSTRATES; DC MAGNETRON SPUTTERING; DIRECT CURRENT MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; GRAPHITE-LIKE STRUCTURES; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MULTI-LAYERED STRUCTURE; NANOSCRATCH TEST; SCRATCH; SMOOTH LAYER; SURFACE PROFILE;

CARBON FILMS; CARBON NITRIDE; DC POWER TRANSMISSION; FRICTION; MECHANICAL PROPERTIES; MICROSTRUCTURE; MONOLAYERS; MULTILAYERS; NANOINDENTATION; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER FILMS;

EID: 78650208719 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2010.11.023 Document Type: Article

Times cited : (28)

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