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Volumn 291, Issue 1, 2006, Pages 22-26

Effect of bias voltages on the synthesis of nanostructured carbon nitride films

Author keywords

A1. Growth; A1. Sputtering; A3. Physical vapor deposition processes; B1. Nitrides

Indexed keywords

ELECTRIC POTENTIAL; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; RAMAN SCATTERING; SYNTHESIS (CHEMICAL);

EID: 33749319061     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.02.025     Document Type: Article
Times cited : (9)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.