Preparation of multi-layer carbon nitride films by alternate processes of magnetron sputtering and ion beam implantation

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 428-432

  Shibata, Tetsuya ^a   Jin, Yun Sik ^b   Matsuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

^b Korea Electrotechnology Research Institute (KERI)   (South Korea)

Author keywords

Fourier transform infrared spectroscopy; Ion implantation; Magnetron sputtering; Multi layer carbon nitride; X ray photoelectron spectroscopy

Indexed keywords

SPUTTERING;

EID: 0034536208     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00782-9     Document Type: Conference Paper

References (22)