Microstructure and tribological performance of CNx-TiNx composite films prepared by pulsed laser deposition

Materials and Design

Volumn 31, Issue 4, 2010, Pages 1716-1719

  Zheng, X H ^a,b   Tu, J P ^a   Song, R G ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION TO SUBSTRATE; BALL-ON-DISK; CODEPOSITION; ENERGY DISPERSIVE X-RAY; FRICTION COEFFICIENTS; HIGH-SPEED STEELS; HUMID AIR; KRF EXCIMER LASER; LOW FRICTION COEFFICIENTS; SEM; SUBSTRATE TEMPERATURE; TRIBOLOGICAL PERFORMANCE; TRIBOMETERS; WEAR RATES;

ADHESION; AUGER ELECTRON SPECTROSCOPY; EXCIMER LASERS; FILM PREPARATION; FRICTION; GAS LASERS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; KRYPTON; LASER SURGERY; MICROSTRUCTURE; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; STEEL POWDER METALLURGY; SUBSTRATES; TARGETS; TITANIUM COMPOUNDS; TITANIUM NITRIDE; TRIBOLOGY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITE FILMS;

EID: 72749110936     PISSN: 02641275     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matdes.2009.01.043     Document Type: Article

References (26)

1. x films with inductively coupled plasma CVD and pulsed laser deposition. Diam Relat Mater 10 (2001) 1901-1909
2. Yap Y.K., Mori Y., Kida S., Aoyama T., and Sasaki T. Carbon nitride thin films synthesized at high temperature by using RF-plasma PLD. J Cryst Growth 198/199 (1999) 1028-1031
3. Suda Y., Nakazono T., Ebihara K., Baba K., and Aoqui S. Pulsed laser deposition of carbon nitride thin films from graphite targets. Carbon 36 (1998) 771-774
4. Klotzbücher T., Scherge M., Mergens M., Wesner D.A., and kreutz E.W. Deposition of carbon nitride thin films in a hybrid r.f.-PLD technique. Surf Coat Technol 98 (1998) 1072-1078
5. Johnson D.J., Chen Y., He Y., and Prince R.H. Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition. Diam Relat Mater 6 (1997) 1799-1805
6. Aryal H.R., Adhikari S., Ghimire D.C., Uchida H., and Umeno M. Argon gas dilution effect on the properties of amorphous carbon nitride thin films. Diam Relat Mater 16 (2007) 1269-1272
7. Geszti O., Radnóczi G., Bertóti I., Szörényi T., Antoni F., and Fogarassy E. Morphology and composition of ArF excimer laser deposited carbon nitride films as determined by analytical TEM. Appl Surf Sci 186 (2002) 502-506
8. Geretovszky Z., and Szörényi T. Compositional and thickness distribution of carbon nitride films grown by PLD in the target plane. Thin Solid Films 453/454 (2004) 172-176
9. Szörényi T., and Fogarassy E. On the growth mechanism of pulsed laser deposited carbon nitride films. Appl Surf Sci 208/209 (2003) 502-506
10. Aoqui S.I., Ebihara K., Yamagata Y., and Ikegami T. Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation. Composite, B 30 (1999) 1117-1122
11. Boher P., Fogarassy E., Szörényi T., and Antoni F. Characterization of CN films deposited by pulsed laser ablation using spectroscopic ellipsometry. Surf Coat Technol 151/152 (2002) 144-150
12. x thin films using NO ambient gas by pulsed laser deposition. Sci Technol Adv Mater 2 (2001) 533-537
13. Szörényi T., Antoni F., Fogarassy E., and Bertóti I. Dependence of nitrogen content and deposition rate on nitrogen pressure and laser parameters in ArF excimer laser deposition of carbon nitride films. Appl Surf Sci 168 (2000) 248-250
14. Rusop M., Soga T., and Jimbo T. The effect of processing parameters on amorphous carbon nitride layer properties. Diam Relat Mater 13 (2004) 2187-2196
15. Escobar-Alarcón L., Arrieta A., Camps E., Romero S., Muhl S., and Camacho-López M.A. A-CN thin film properties as a function of laser ablation plasma parameters. Diam Relat Mater 16 (2007) 1291-1294
16. x films. Diam Relat Mater 15 (2006) 1732-1737
17. 4 balls in water. Wear 263 (2007) 1253-1258
18. x/ZrN multilayers prepared by DC magnetron sputtering. Thin Solid Films 308/309 (1997) 113-117
19. y multilayers by ion beam sputtering. J Cryst Growth 233 (2001) 303-311
20. x superlattice thin films. Surf Coat Technol 203 (2008) 790-793
21. Tu J.P. The effect of TiN coating on erosion-corrosion resistance of a-Ti alloy in saline slurry. Corros Sci 42 (2000) 147-163
22. Tu J.P., Zhu L.P., and Zhao H.X. Slurry erosion characteristics of TiN coatings on α-Ti and plasma-nitrided Ti alloy substrates. Surf Coat Technol 122 (1999) 176-182
23. Zheng X.H., Tu J.P., Gu B., and Hu S.B. Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering. Wear 265 (2008) 261-265
24. Sen U. Friction and wear properties of thermo-reactive diffusion coatings against titanium nitride coated steels. Mater Des 26 (2005) 167-174
25. Titantah J.T., and Lamoen D. Carbon and nitrogen 1s energy levels in amorphous carbon nitride systems: XPS interpretation using first-principles. Diam Relat Mater 16 (2007) 581-588
26. Lenk A., Schultrich B., Witke T., and Weiß H.-J. Energy and particle fluxes in PLD processes. Appl Surf Sci 109/110 (1997) 419-423