Industrial-scale deposition of highly adherent CNx films on steel substrates

Surface and Coatings Technology

Volumn 204, Issue 21-22, 2010, Pages 3349-3357

  Broitman, E ^a,b   Czigány, Zs ^c   Greczynski, G ^a   Bohlmark J ^d   Cremer, R ^e,f   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^d Sandvik Tooling   (Sweden)

^e CemeCon AG   (Germany)

^f KCS Europe GmbH   (Germany)

Author keywords

Adhesion; Carbon nitride; CNx; HIPIMS; HPPMS

Indexed keywords

AMORPHOUS TRANSITION; CRITICAL LOAD; DAIMLER-BENZ; GRAPHITE TARGET; HIGH PURITY; HIGH-POWER; INTERFACIAL MIXING; MASTER-SLAVE CONFIGURATIONS; POLYCRYSTALLINE; POWER SUPPLY; PRE-TREATMENT; ROCKWELL; ROOM TEMPERATURE; SCALE DEPOSITION; SCRATCH TEST; STEEL SUBSTRATE; SUBSTRATE BIAS; TRANSMISSION MICROSCOPY; UNBALANCED MAGNETRON SPUTTERING;

ADHESION; AMORPHOUS MATERIALS; CARBON NITRIDE; CHROMIUM; DC POWER TRANSMISSION; METAL IONS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 77953719955     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.03.038     Document Type: Article

References (55)

1. Broitman E., Neidhardt J., Hultman L. Tribology of Diamond-Like Carbon Films: Fundamentals and Applications 2007, 620. Springer, N. York. C. Donnet, A. Erdemir (Eds.).
2. Broitman E., Gueorguiev G.K., Furlan A., Son N.T., Gellman A.J., Stafström S., Hultman L. Thin Solid Films 2008, 517(3):1106.
3. Broitman E., Pushkarev V.V., Gellman A.J., Neidhardt J., Furlan A., Hultman L. Thin Solid Films 2006, 513(3):979.
4. Broitman E., Zheng W.T., Sjostrom H., Ivanov I., Greene J.E., Sundgren J.E. Appl. Phys. Lett. 1998, 72(20):2532.
5. Broitman E., Czigány Z., Cremer R., Zhou X., Hultman L. Book of Abstracts - 36th International Conference on Metallurgical Coatings and Thin Films, Advanced Surface Engineering Division, American Vacuum Society 2009, 75. San Diego (CA).
6. Broitman E., Greczynski G., Bohlmark J., Alunovic M., Cremer R., Hultman L. Book of Abstracts - 35th International Conference on Metallurgical Coatings and Thin Films 2008, 108. San Diego (CA).
7. E. Broitman, L. Hultman, and R. Cremer, "Beschichtungsverfahren und Vorrichtung zum Beschichten" (Coating process and device for coating) 2008: Germany - Patent # DE102008021912A1 Date: 05.11.2009.
8. Bertrand N., Drevillon B., Gheorghiu A., Senemaud C., Martinu L., Klemberg-Sapieha J.E. J. Vac. Sci. Technol. A: Vac., Surf., Films 1998, 16(1):6.
9. Chapman B.N. J. Vac. Sci. Technol. 1974, 11(1):106.
10. D.M. Mattox. 2003, William Andrew Inc. Publishers: New York. p. 34-36.
11. Mattox D.M. Handbook of Vacuum Technology 1998, Academic Press, New York, Chapter 4.9. D.M. Hoffman, B. Sing, J.H. Thomas (Eds.).
12. Strong J. Rev. Sci. Instrum. 1935, 6:97.
13. Bunshah R.F. Handbook of Deposition Technologies for Films and Coatings 1995, 117. Noyes Publications, N. York. R.F. Bunshah (Ed.).
14. Baglin J.E.E. Fundamentals of Adhesion 1991, Springer, New York, 363. L.H. Lee (Ed.).
15. Farnsworth H.E., Schlier R.E., George T.H., Burger R.M. J. Appl. Phys. 1955, 26(2):252.
16. Mattox D.M. Electrochem. Technol. 1965, 2:295.
17. Ohring M. The Materials Science of Thin Films 1992, 129. Academic Press, New York.
18. Anders A. Surf. Coat. Technol. 2005, 200(5-6):1893.
19. Ehiasarian A.P., Wen J.G., Petrov I. J. Appl. Phys. 2007, 101(5):054301.
20. Olbrich W., Fessman J., Kampschulte G., Ebberink J. Surf. Coat. Technol. 1991, 49:258.
21. Audronis M., Matthews A., Leyland A. J. Phys. D: Appl. Phys. 2008, 3:035309.
22. Arnell R.D., Kelly P.J., Bradley J.W. Surf. Coat. Technol. 2004, 188-189:158.
23. Anders A. Surf. Coat. Technol. 2004, 183:301.
24. Cooke K.E., Hamsphire J., Southall W., Teer D.G. Surf. Coat. Technol. 2004, 177-178:789.
25. Håkansson G., Hultman L., Sundgren J.E., Greene J.E., Münz W.D. Surf. Coat. Technol. 1991, 48(1):51.
26. Münz W.D., Schulze D., Hauzer F.J.M. Surf. Coat. Technol. 1992, 50(2):169.
27. Anders A. Vacuum 2002, 67(3-4):673.
28. Brown I.G. Annu. Rev. Mater. Sci. 1998, 28:243.
29. Helmersson U., Lattemann M., Bohlmark J., Ehiasarian A.P., Gudmundsson J.T. Thin Solid Films 2006, 513(1-2):1.
30. C. Schonjahn, A.P. Ehiasarian, D.B. Lewis, R. New, W.D. Munz, R.D. Twesten, and I. Petrov. in. 2001: AVS.
31. Münz W.D., Smith I.J., Lewis D.B., Creasey S. Vacuum 1997, 48(5):473.
32. Ehiasarian A.P., Münz W.D., Hultman L., Helmersson U., Petrov I. Surf. Coat. Technol. 2003, 163-164:267.
33. Ehiasarian A.P., Hovsepian P.E., Hultman L., Helmersson U. Thin Solid Films 2004, 457(2):270.
34. Münz W.D. Vak. Forsch. Prax. 2008, 20(S1):27.
35. Lattemann M., Ehiasarian A.P., Bohlmark J., Persson P.Å.O., Helmersson U. Surf. Coat. Technol. 2006, 200(22-23):6495.
36. Hovsepian P.E., Ehiasarian A.P., Deeming A., Schimpf C. Vacuum 2008, 82(11):1312.
37. Hovsepian P.E., Ehiasarian A.P., Ratayski U. Surf. Coat. Technol. 2009, 203(9):1237.
38. Hovsepian P.E., Reinhard C., Ehiasarian A.P. Surf. Coat. Technol. 2006, 201(7):4105.
39. Munz W.D., Schenkel M., Kunkel S., Paulitsch J., Bewilogua K. J. Phys.: Conf. Ser. 2008, 100(8):082001.
40. Donohue L.A., Torosyan A., May P., Wolfe D.E., Kulik J., Eden T.J. Plat. Surf. Finish. March 2009, 38.
41. Databases used for research of scientific publications: SciFinder, Web of Science, and Google Scholar.
42. Bias power supply type BP12 manufactured by Huettinger Electronic.
43. A.P. Ehiasarian, R. Tietema, P.E. Hovsepian, and D. Doerwald, Vacuum treatment apparatus with additional voltage supply - Patent Application GB20060007269 20060411. 2007, Hauzer Techno Coating BV (NL); Univ Sheffield Hallam (GB): United Kingdom.
44. Verein-Deutscher-Ingenieure, Daimler Benz Adhesion Test, VDI 3198 1992, 7. VDI-Verlag, Dusseldorf.
45. Vidakis N., Antoniadis A., Bilalis N. J. Mater. Process. Technol. 2003, 143-144:481.
46. J. Böhlmark, Fundamentals of High Power Impulse Magnetron Sputtering, in Department of Physics, Chemistry and Biology (IFM). 2006, Linköping University, Ph.D. Dissetation Nr. 1014. p. 64.
47. Ehiasarian A.P., New R., Münz W.D., Hultman L., Helmersson U., Kouznetsov V. Vacuum 2002, 65(2):147.
48. Vetushka A., Ehiasarian A.P. J. Phys. D: Appl. Phys. 2008, 41:015204.
49. Christou C., Barber Z.H. J. Vac. Sci. Technol. A: Vac., Surf., Films 2000, 18(6):2897.
50. Bohlmark J., Alami J., Christou C., Ehiasarian A.P., Helmersson U. J. Vac. Sci. Technol. A: Vac., Surf, Films 2005, 23(1):18.
51. Bergner F., Ulbricht A., Heintze C. Scr. Mater. 2009, 61(11):1060.
52. Ehiasarian A.P., Anders A., Petrov I. J. Vac. Sci. Technol. A: Vac., Surf., Films 2007, 25(3):543.
53. Guyer R.A. Rolling Bearings Handbook and Troubleshooting Guide 1996, 4. CRC Press, New York.
54. Broitman E., Hellgren N., Czigany Z., Twesten R., Luning J., Petrov I., Hulttman L., Holloway B.C. J. Vac. Sci. Technol. A 2003, 21:851.
55. Bull S.J., Berasetegui E.G. Tribol. Int. 2006, 39(2):99.