Enhancement of the mechanical properties of the carbon nitride thin films by doping

Carbon

Volumn 42, Issue 5-6, 2004, Pages 1107-1111

  Sarangi, D ^a   Sanjines R ^a   Karimi, A ^a  

^a EPFL   (Switzerland)

Author keywords

A. Carbon nitride; B. Doping; C. AFM, FTIR

Indexed keywords

DOPING (ADDITIVES); ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

FILM HARDNESS; FLOW RATIO; PHASE DIAGRAM; SUBSTRATE TEMPERATURE;

CARBON NITRIDE;

EID: 2342534548     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2003.12.050     Document Type: Conference Paper

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