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Thin Solid Films

Volumn 493, Issue 1-2, 2005, Pages 160-169

Tribology of carbon nitride and boron nitride nanoperiod multilayer films and its application to nanoscale processing

(1) Miyake, Shojiro a

a NIPPON INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

Atomic force microscopy; Multilayers; Nitrides; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; BORON COMPOUNDS; FRACTURE; GRAPHITE; MULTILAYERS; NITRIDES; SPUTTERING; WEAR OF MATERIALS;

BORON NITRIDE; MULTILAYER FILMS; NANOMETER SCALE MECHANICAL PROCESSING;

CARBON NITRIDE;

EID: 27144453581 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.284 Document Type: Article

Times cited : (21)

References (21)

1
- 0026867492
- S. Miyake, and R. Kaneko Thin Solid Films 212 1992 256
- (1992) Thin Solid Films , vol.212 , pp. 256
- Miyake, S.¹ Kaneko, R.²

2
- 0026138019
- S. Miyake, R. Kaneko, Y. Kikuya, and I. Sugimoto Trans. ASME, J. Tribol. 113 1991 384
- (1991) Trans. ASME, J. Tribol. , vol.113 , pp. 384
- Miyake, S.¹ Kaneko, R.² Kikuya, Y.³ Sugimoto, I.⁴

3
- 0029254552
- S. Miyake, T. Miyamoto, R. Kaneko, and T. Miyazaki IEICE Trans. Electron E78 C, 2 1995 180
- (1995) IEICE Trans. Electron , vol.E78 C , Issue.2 , pp. 180
- Miyake, S.¹ Miyamoto, T.² Kaneko, R.³ Miyazaki, T.⁴

4
- 0039862088
- S. Miyake, R. Kaneko, and T. Miyamoto Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 108 1996 70
- (1996) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms , vol.108 , pp. 70
- Miyake, S.¹ Kaneko, R.² Miyamoto, T.³

5
- 0000656203
- S. Miyake, S. Watanabe, H. Miyazawa, M. Murakawa, R. Kaneko, and T. Miyamoto Appl. Phys. Lett. 65 25 1994 3206
- (1994) Appl. Phys. Lett. , vol.65 , Issue.25 , pp. 3206
- Miyake, S.¹ Watanabe, S.² Miyazawa, H.³ Murakawa, M.⁴ Kaneko, R.⁵ Miyamoto, T.⁶

6
- 0026869253
- S. Miyake, S. Watanabe, M. Murakawa, R. Kaneko, and T. Miyamato Thin Solid Films 212 1992 262
- (1992) Thin Solid Films , vol.212 , pp. 262
- Miyake, S.¹ Watanabe, S.² Murakawa, M.³ Kaneko, R.⁴ Miyamato, T.⁵

7
- 27144452424
- M.Y. Chen, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong, and W.D. Sproul Surf. Coat. Technol. 54/55 1992 60
- (1992) Surf. Coat. Technol. , vol.54-55 , pp. 60
- Chen, M.Y.¹ Lin, X.² Dravid, V.P.³ Chung, Y.W.⁴ Wong, M.S.⁵ Sproul, W.D.⁶

8
- 84881192995
- M.Y. Chen, D. Li, X. Lin, V.P. Dravid, Y.W. Chung, M.S. Wong, and W.D. Sproul J. Vac. Sci. Technol., A, Vac. Surf. Films 11 3 1993 521
- (1993) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.11 , Issue.3 , pp. 521
- Chen, M.Y.¹ Li, D.² Lin, X.³ Dravid, V.P.⁴ Chung, Y.W.⁵ Wong, M.S.⁶ Sproul, W.D.⁷

9
- 0027626327
- C. Niu, Y.Z. Lu, and C.M. Lieber Science 261 1993 334
- (1993) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

10
- 0028729965
- D. Li, E. Cutiongco, Y.W. Chung, M.S. Wong, and W.D. Sproul Surf. Coat. Technol. 68/69 1994 611
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 611
- Li, D.¹ Cutiongco, E.² Chung, Y.W.³ Wong, M.S.⁴ Sproul, W.D.⁵

11
- 0037274498
- S. Miyake J. Vac. Sci. Technol. B21 2 2003 785
- (2003) J. Vac. Sci. Technol. , vol.21 , Issue.2 , pp. 785
- Miyake, S.¹

12
- 0003692711
- Forces in Scanning Probe Methods
- H.-J. Giintherodt D. Anselmetti E. Mayer Kluwer Academic Publishers Dordrecht, Netherlands
- R. Kaneko, and M. Igarashi H.-J. Giintherodt D. Anselmetti E. Mayer Forces in Scanning Probe Methods NATO ASI Series E, Applied Sciences vol. 286 1995 Kluwer Academic Publishers Dordrecht, Netherlands 405
- (1995) NATO ASI Series E, Applied Sciences , vol.286 , pp. 405
- Kaneko, R.¹ Igarashi, M.²

13
- 0029296702
- H.J. Mamin, L.S. Fan, S. Hoen, and D. Rugar Sens. Actuators, A, Phys. 48 1995 215
- (1995) Sens. Actuators, A, Phys. , vol.48 , pp. 215
- Mamin, H.J.¹ Fan, L.S.² Hoen, S.³ Rugar, D.⁴

14
- 6144290977
- H.J. Mamin, and D. Rugar Appl. Phys. Lett. 61 1992 1003
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1003
- Mamin, H.J.¹ Rugar, D.²

15
- 0033092584
- G. Binnig, M. Despont, U. Drechsler, W. Haberle, M. Lutwyche, P. Vettiger, H.J. Mamin, B.W. Chui, and T.W. Kenny Appl. Phys. Lett. 74 1999 1329
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1329
- Binnig, G.¹ Despont, M.² Drechsler, U.³ Haberle, W.⁴ Lutwyche, M.⁵ Vettiger, P.⁶ Mamin, H.J.⁷ Chui, B.W.⁸ Kenny, T.W.⁹

16
- 33846170970
- S. Miyake Appl. Phys. Lett. 65 8 1994 980
- (1994) Appl. Phys. Lett. , vol.65 , Issue.8 , pp. 980
- Miyake, S.¹

17
- 36448998858
- S. Miyake Appl. Phys. Lett. 67 13 1995 2925
- (1995) Appl. Phys. Lett. , vol.67 , Issue.13 , pp. 2925
- Miyake, S.¹

18
- 0036757474
- S. Miyake, and K. Matsuzaki Jpn. J. Appl. Phys. 41 9 2002 5706
- (2002) Jpn. J. Appl. Phys. , vol.41 , Issue.9 , pp. 5706
- Miyake, S.¹ Matsuzaki, K.²

19
- 84974183414
- M.F. Doerner, and W.D. Nix J. Mater. Res. 1 4 1986 601
- (1986) J. Mater. Res. , vol.1 , Issue.4 , pp. 601
- Doerner, M.F.¹ Nix, W.D.²

20
- 0038699287
- S. Miyake, and J. Kim Jpn. J. Appl. Phys. 42 3B 2003 L322
- (2003) Jpn. J. Appl. Phys. , vol.42 , Issue.3
- Miyake, S.¹ Kim, J.²

21
- 0031069259
- Z.N. Farhat, Y. Ding, D.O. Northwood, and A.T. Alps Surf. Coat. Technol. 89 1997 24
- (1997) Surf. Coat. Technol. , vol.89 , pp. 24
- Farhat, Z.N.¹ Ding, Y.² Northwood, D.O.³ Alps, A.T.⁴

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