Thermal stability of hard TiN/SiNx multilayer coatings with an equiaxed microstructure

Surface and Coatings Technology

Volumn 154, Issue 2-3, 2002, Pages 162-166

  Chen, Yu Hsia ^a   Guruz, Murat ^a   Chung, Yip Wah ^a   Keer, Leon M ^a  

^a Northwestern University   (United States)

Author keywords

Microstructure; Multilayer coatings; Nanolayer; Sputtering; Thermal stability

Indexed keywords

ANNEALING; COATINGS; MICROSTRUCTURE; X RAY DIFFRACTION;

REACTIVE-MAGNETRON SPUTTERING SYSTEMS;

THERMODYNAMIC STABILITY;

COATING; HARDNESS; MICROSTRUCTURE; SILICON NITRIDE; STABILITY; TITANIUM NITRIDE;

EID: 0037094380     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00023-3     Document Type: Article

References (13)