Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas

Plasma Sources Science and Technology

Volumn 19, Issue 6, 2010, Pages

  Boffard, John B ^a   Jung, R O ^a   Lin, Chun C ^a   Wendt, A E ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGIES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON-IMPACT EXCITATION; EMISSION LINES; EMISSION SPECTRUMS; HIGH ENERGY TAILS; INDUCTIVELY-COUPLED; LANGMUIR PROBE MEASUREMENTS; LOW TEMPERATURE PLASMAS; MAXWELL-BOLTZMANN DISTRIBUTION; NON-MAXWELLIAN DISTRIBUTION; NONINVASIVE TECHNIQUE; NUMBER DENSITY; OPTICAL EMISSION MODEL; OPTICAL EMISSIONS; OPTICAL MODELING; OPTICAL TECHNIQUE; PLASMA SYSTEMS; PROBE MEASUREMENTS; RADIATION TRAPPING; SOURCE CONDITIONS;

ARGON; BOLTZMANN EQUATION; DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY LEVELS; ELECTRONS; EMISSION SPECTROSCOPY; IMPACT IONIZATION; INDUCTIVELY COUPLED PLASMA; LIGHT EMISSION; OPTICAL ENGINEERING; PLASMA DEVICES; PLASMA THEORY; PROBES;

ELECTRON ENERGY ANALYZERS;

EID: 78649943776     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/6/065001     Document Type: Article

References (68)

1. Godyak V A 2006 Nonequilibrium EEDF in gas discharge plasmas IEEE Trans. Plasma Sci. 34 755-66
2. Godyak V A, Piejak R B and Alexandrovich B M 1992 Measurements of electron energy distribution in low pressure RF discharges Plasma Sources Sci. Technol. 1 36-58
3. Avtaeva S V and Skornyakov A V 2009 Effect of nonlocal electron kinetics on the characteristics of a dielectric barrier discharge in xenon Plasma Phys. Rep. 35 593-602
4. Iza F, Lee J K and Kong M G 2007 Electron kinetics in radio-frequency atmospheric-pressure microplasmas Phys. Rev. Lett. 99 075004
5. Choi J, Iza F, Lee J K and Ryu C-M 2007 Electron and ion kinetics in a DC microplasma at atmospheric pressure IEEE Trans. Plasma Sci. 35 1274-8
6. Godyak V A, Piejak R B and Alexandrovich B M 2002 Electron enery distribution function measurements and plasma parameters in inductively coupled argon plasma Plasma Sources Sci. Technol. 11 525-43
7. Malyshev M V and Donnelly V M 1997 Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry J. Vac. Sci. Technol. A 15 550
8. Donnelly V M and Schabel M J 2002 Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy J. Appl. Phys. 91 6288
9. 2-Ar plasmas J. Vac. Sci. Technol. A 20 170-3
10. Zhu X-M, Chen W-C, Li J and Pu Y-K 2009 Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges J. Phys. D: Appl. Phys. 42 025203
11. Crintea D L, Czarnetzki U, Iordanova S, Koleva I and Luggenhölscher D 2009 Plasma diagnostics by optical emission spectroscopy on argon and comparison with Thomson scattering J. Phys. D: Appl. Phys. 42 045208
12. Gans T, Schulz-von der Gathen V and Döbele H F 2004 Spectroscopic measurements of phase resolved electron energy distribution functions in RF-excited discharges Europhys. Lett. 66 232-8
13. Schulze J, Schüngel E, Donkó Z, Luggenhölscher D and Czarnetzki U 2010 Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges J. Phys. D: Appl. Phys. 43 124016
14. 2 and Cl number densities J. Appl. Phys. 88 6207-15
15. Shannon S, Holloway J P and Brake M L 1999 Spatially resolved fluorine actinometry J. Vac. Sci. Technol. A 17 2703-8
16. 2 plasma for dry etching of GaAs J. Appl. Phys. 98 023307
17. Czerwiec T, Greer F and Graves D B 2005 Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry J. Phys. D: Appl. Phys. 38 4278-89
18. Sugai H, Ghanashev I, Hosokawa M, Mizuno K, Nakamura K, Toyoda H, and Yamauchi K 2001 Electron energy distribution functions and the influence on fluorocarbon plasma chemistry Plasma Sources Sci. Technol. 10 378-85
19. Lu Z C, Foster J E, Snodgrass T G, Booske J H and Wendt A E 1999 Measurements of electron energy distribution function in an argon/copper plasma for ionized physical vapor deposition J. Vac. Sci. Technol. A 17 840-4
20. 2 plasmas Surf. Coat. Technol. 97 391-403
21. Andrew Y, Lu Z, Snodgrass T, Teitzel G and Wendt A E 2000 Interactions between plasmas in ionized physical vapor deposition discharges J. Vac. Sci. Technol. A 18 2137-42
22. Boffard J B, Jung R O, Lin C C and Wendt A E 2009 Measurement of metastable and resonance level densities in rare gas plasmas by optical emission spectroscopy Plasma Sources Sci. Technol. 18 035017
23. Godyak V A, Piejak R B and Alexandrovich B M 1993 Probe diagnostics of non-Maxwellian plasmas J. Appl. Phys. 73 3657
24. Seo S-H, Kim S S, Hong J-I, Chang C S and Chang H-Y 2000 Evolution of the electron energy distribution function in a planar inductive argon discharge Appl. Phys. Lett. 76 149-51
25. Gudmundsson J T 2001 On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study Plasma Sources Sci. Technol. 10 76-81
26. Amemiya H 1997 Sheath formation criterion and ion flux for non-Maxwellian plasma J. Phys. Soc. Japan 66 1335-8
27. Druyvesteyn M J and Penning F M 1940 The mechanism of electrical discharges in gases of low pressure Rev. Mod. Phys. 12 87-174
28. Meige A and Boswell R W 2006 Electron energy distribution functions in low-pressure inductively coupled bounded plasmas Phys. Plasmas 13 092104
29. Kolobov V I, Beale D F, Mahoney L J and Wendt A E 1994 Non-local electron kinetics in an inductively coupled radio frequency discharge Appl. Phys. Lett. 65 537
30. Mahoney L J, Wendt A E, Barrios E, Richards C J and Leon Shohet J 1994 Electron-density and energy distributions in a planar inductively coupled discharge J. Appl. Phys. 76 2041-7
31. Ralchenko Yu, Kramida A E, Reader J and NIST ASD Team 2010 NIST Atomic Spectra Database (version 3.1.5), [Online]. Available: http://www.nist.gov/asd3 National Institute of Standards and Technology, Gaithersburg, MD
32. Hebner G A 1996 Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas J. Appl. Phys. 80 2624-36
33. 2 metastable level density and temperature measurement in a low-density argon plasma Plasma Sources Sci. Technol. 6 185-8
34. O'Connell D, Gans T, Crintea D L, Czarnetzki U and Sadeghi N 2008 Neutral gas depletion mechanisms in dense low-temperature argon plasmas J. Phys. D: Appl. Phys. 41 035208
35. Clarenbach B, Lorenz B, Krämer M and Sadeghi N 2003 Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon Plasma Sources Sci. Technol. 12 345-57
36. MacAdam K B, Steinbach A and Wieman C 1992 A narrow-band tunable diode laser system with grating feedback, and a saturated absorption spectrometer for Cs and Rb Am. J. Phys. 60 1098-111
37. Andrew Y, Abraham I, Booske J H, Lu Z C and Wendt A E 2000 Absolute densities of long lived species in an ionized physical vapor deposition copper-argon plasma J. Appl. Phys. 88 3208
38. Kiehlbauch M W and Graves D B 2002 Modeling argon inductively coupled plasmas: the electron energy distribution function and metastable kinetics J. Appl. Phys. 91 3539-46
39. Druyvesteyn M J 1930 Der Niedervoltbogen Z. Phys. 64 781
40. Wendt A E 2001 Passive external radio frequency filter for Langmuir probes Rev. Sci. Instrum. 72 2926-30
41. Godyak V A 1990 Probe measurements of the space potential in a radio frequency discharge J. Appl. Phys. 68 3157-62
42. Magnus F and Gudmundsson J T 2008 Digital smotthing of the Langmuir probe I-V characteristic Rev. Sci. Instrum. 79 073503
43. Boffard J B, Chiaro B, Weber T and Lin C C 2007 Electron-impact excitation of argon: optical emission cross sections in the range 300-2500 nm. At. Data Nucl. Data Tables 93 831-63
44. 54p levels of argon using Fourier-transform spectroscopy Phys. Rev. A 57 267-77
45. Schabel M J, Donnelly V M, Kornbilt A and Tai W W 2002 Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled flurocarbon/rare gas plasmas using optical emission spectroscopy J. Vac. Sci. Technol. A 20 555-63
46. Boffard J B, Piech G A, Gehrke M F, Anderson L W and Lin C C 1999 Measurement of electron-impact excitation cross sections out of metastable levels of argon and comparison with ground-state excitation Phys. Rev. A 59 2749-63
47. Piech G A, Boffard J B, Gehrke M F, Anderson L W and Lin C C 1998 Measurement of cross sections for electron excitation out of the metastable levels of argon Phys. Rev. Lett. 81 309-12
48. Boffard J B, Jung R O, Anderson L W and Lin C C 2006 Electron-impact excitation of rare-gas atoms from the ground level and metastable levels Adv. At. Mol. Opt. Phys. 54 319-421
49. 57p levels from the ground level and the J = 2 metastable level of Xe Phys. Rev. A 80 062708
50. Donnelly V M 2004 Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy J. Phys. D: Appl. Phys. 37 R217-36
51. Boffard J B, Lin C C and DeJoseph C A 2004 Application of excitation cross sections to optical plasma diagnostics J. Phys. D: Appl. Phys. 37 R143-61
52. 4 mixtures J. Phys. D: Appl. Phys. 35 454
53. Moshkalyov S A, Steen P G, Gomez S and Graham W G 1999 Role of low-energy electrons in Ar emission from low-pressure radio frequency discharge plasma Appl. Phys. Lett. 75 328
54. Lin C C 2004 Measurements of electron-impact excitation cross sections out of the ground and metastable levels of rare gases and applications to low-temperature plasmas Contrib. Plasma Phys. 44 405-12
55. Booth J P, Cunge G and Sadeghi N 1997 The transition from symmetric to asymmetric discharges in pulsed 13.56MHz capacitively coupled plasmas J. Appl. Phys. 82 552-60
56. Petrović Z Lj, Bzenić S, Jovanović J and Djurović S 1995 On spatial distribution of optical emission in radio frequency discharges J. Phys. D: Appl. Phys. 28 2287-93
57. Shimada M, Tynan G R and Cattolica R 2008 Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo J. Appl. Phys. 103 033304
58. Schulze M, Yanguas-Gil A, von Keudell A and Awakowicz P 2008 A robust method to measure metastable and resonant state densities from emission spectra in argon and argon-diluted low pressure plasmas J. Phys. D: Appl. Phys. 41 065206
59. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
60. Velazco J E, Kolts J H and Setser D W 1978 Rate constants and quenching mechanisms for the metastable states of argon, krypton, and xenon J. Chem. Phys. 69 4357
61. Behringer K and Fantz U 1994 Spectroscopic diagnostics of glow discharge plasmas with non-Maxwellian electron energy distributions J. Phys. D: Appl. Phys. 27 2128
62. Boffard J B, Jung R O, Lin C C and Wendt A E 2010 in preparation
63. 55p levels from the metastable levels of Ar Phys. Rev. A 75 052707
64. Zatsarinny O and Bartschat K 2006 B-spline calculations of oscillator strengths in neutral argon J. Phys. B: At. Mol. Opt. Phys. 39 2145
65. Zhu X-M and Pu Y-K 2007 A simple collional-radiative model for low-pressure argon discharges J. Phys. D: Appl. Phys. 40 2533-8
66. Zhu X-M and Pu Y-K 2007 A simple collisional-radiative model for low-pressure argon-oxygen mixture discharges J. Phys. D: Appl. Phys. 40 5202-5
67. Iordanova S and Koleva I 2007 Optical emission spectroscopy diagnostics of inductively-driven plasmas in argon gas at low pressures Spectrochim. Acta B 62 344-56
68. Zhu X-M and Pu Y-K 2010 A simple collisional-radiative model for low-temperature argon discharges with pressure ranging from 1 Pa to atmospheric pressure: kinetics of Paschen 1s and 2p levels J. Phys. D: Appl. Phys. 43 015204