Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

Physics of Plasmas

Volumn 13, Issue 9, 2006, Pages

  Meige, Albert ^a   Boswell, Rod W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; ELECTRONS; HIGH ENERGY PHYSICS; PLASMA COLLISION PROCESSES; PLATES (STRUCTURAL COMPONENTS); PRESSURE EFFECTS;

COUPLED BOUNDED PLASMAS; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); MEAN FREE PATH; PLASMA POTENTIAL;

INDUCTIVELY COUPLED PLASMA;

EID: 33749327945     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2339024     Document Type: Article

References (39)

1. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990).
2. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Phys. Rev. Lett. 68, 40 (1992).
3. M. M. Turner, R. A. Doyle, and M. B. Hopkins, Appl. Phys. Lett. 62, 3247 (1993).
4. V. A. Godyak and R. B. Piejak, Appl. Phys. Lett. 63, 3137 (1993).
5. V. A. Godyak, V. P. Meytlis, and H. R. Strauss, IEEE Trans. Plasma Sci. 23, 728 (1995).
6. V. A. Godyak and V. I. Kolobov, Phys. Rev. Lett. 81, 369 (1998).
7. L. Granovski, Electric Current in Gas (Steady Current) (Nauka, Moscow, 1971).
8. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 11, 525 (2002).
9. M. A. Biondi, Phys. Rev. 93, 1136 (1954).
10. R. E. Robson, Phys. Rev. E 61, 848 (2000).
11. J. H. Parker, Phys. Rev. 139, 1792 (1965).
12. T. Rhymes and R. W. Crompton, Aust. J. Phys. 28, 675 (1975).
13. S. Ashida, C. Lee, and M. A. Lieberman, J. Vac. Sci. Technol. A 13, 2498 (1995).
14. S. Ashida, M. R. Shim, and M. A. Lieberman, J. Vac. Sci. Technol. A 14, 391 (1996).
15. V. I. Kolobov, D. P. Lymberopoulos, and D. J. Economou, Phys. Rev. E 55, 3408 (1997).
16. R. R. Arslanbekov, A. A. Kudryavtsev, and L. D. Tsendin, Phys. Rev. E 64, 016401 (2001).
17. R. R. Arslanbekov and A. A. Kudryavtsev, Phys. Rev. E 58, 7785 (1998).
18. U. Kortshagen, A. Maresca, K. Korlov, and B. Heil, Appl. Surf. Sci. 192, 244 (2002).
19. A. Maresca, K. Orlov, and U. Kortshagen, Phys. Rev. E 65, 056405 (2002).
20. C. K. Birdsall and D. Fuss, J. Comput. Phys. 3, 494 (1969).
21. A. B. Langdon and C. K. Birdsall, Phys. Fluids 13, 2115 (1970).
22. R. W. Hockney and J. W. Eastwood, Computer Simulation Using Particles (IOP, Bristol, 1988).
23. C. K. Birdsall and A. B. Langdon, Plasma Physics Via Computer Simulation (IOP, Bristol, 1991).
24. V. Vahedi and M. Surendra, Comput. Phys. Commun. 87, 179 (1995).
25. K. Tachibana, Phys. Rev. A 34, 1007 (1986).
26. J. L. Pack, R. E. Voshall, A. V. Phelps, and L. E. Kline, J. Appl. Phys. 71, 5363 (1992).
27. A. V. Phelps, J. Appl. Phys. 1994, 747 (1994).
28. D. Vender, Ph.D. thesis, Research School of Physical Science and Engineering - Australian National University, 1990.
29. D. Vender and R. W. Boswell, IEEE Trans. Plasma Sci. 18, 725 (1990).
30. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley Interscience, New York, 1994).
31. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
32. A. Meige, R. W. Boswell, C. Charles, and M. M. Turner, Phys. Plasmas 12, 052317 (2005).
33. M. A. Raadu, Phys. Rep. 178, 25 (1989).
34. C. K. Goertz and G. Joyce, Astrophys. Space Sci. 32, 165 (1975).
35. G. Joyce and R. F. Hubbard, J. Plasma Phys. 20, 391 (1978).
36. I. B. Bernstein and T. Holstein, Phys. Rev. 94, 1475 (1954).
37. L. D. Tsendin, Sov. Phys. JETP 39, 805 (1974).
38. V. I. Kolobov and V. A. Godyak, IEEE Trans. Plasma Sci. 23, 503 (1995).
39. B. Legradic, Master's thesis, Space Plasma, Power and Propulsion - The Australian National University, 2006.