The transition from symmetric to asymmetric discharges in pulsed 13.56 MHz capacitively coupled plasmas

Journal of Applied Physics

Volumn 82, Issue 2, 1997, Pages 552-560

  Booth, J P ^a   Cunge, G ^a   Sadeghi, N ^a   Boswell, R W ^b  

^a UNIV GRENOBLE ALPES   (France)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001738237     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365614     Document Type: Article

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