Non-Maxwellian effect on species and energy transport in moderate pressure H2 plasmas

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 391-403

  Hassouni, K ^a   Scott, C D ^a,c   Farhat, S ^a   Gicquel, A ^a   Capitelli, M ^b  

^a UNIVERSITÉ PARIS 13   (France)

^b UNIVERSITY OF BARI   (Italy)

^c NASA JOHNSON SPACE CENTER   (United States)

Author keywords

CVD; Diamond; H2; Modeling; Plasma

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRON ENERGY LEVELS; ELECTRON TRANSPORT PROPERTIES; ENERGY TRANSFER; HYDROGEN; IONIZATION OF SOLIDS;

ELECTRON BOLTZMANN EQUATION; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF);

PLASMA SOURCES;

EID: 0031347184     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00201-6     Document Type: Article

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