On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study

Plasma Sources Science and Technology

Volumn 10, Issue 1, 2001, Pages 76-81

  Gudmundsson, J T ^a  

^a UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC DENSITY OF STATES; MAXWELL EQUATIONS; PLASMA DENSITY; PRESSURE; TEMPERATURE;

ARGON DISCHARGES; ELECTRON ENERGY DISTRIBUTION FUNCTION; PLASMA PARAMETERS;

PLASMA SOURCES;

EID: 0035248792     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/10/1/310     Document Type: Article

References (19)

1. Lieberman M A and Gottscho R A 1994 Physics of Thin Films vol 18, ed M Francombe and J Vossen (New York: Academic) pp 1-119
2. Burggraaf P 1994 Semicond. Int. 15 56
3. Lee C, Graves D B, Lieberman M A and Hess D W 1994 J. Electrochem. Soc. 141 1546
4. Lee C and Lieberman M A 1995 J. Vac. Sci. Technol. A 13 368
5. Wainman P N, Lieberman M A, Lichtenberg A, Stewart R and Lee C 1995 J. Vac. Sci. Technol. A 13 2464
6. Gudmundsson J T, Marakhtanov A M, Patel K K, Gopinath V P and Lieberman M A 2000 J. Phys. D: Appl. Phys. 33 1323
7. Gudmundsson J T, Kimura T and Lieberman M A 1999 Plasma Sources Sci. Technol. 8 22
8. Haas F A and Braithwaite N S J 1999 Appl. Phys. Lett. 74 338
9. Druyvesteyn M J and Penning F M 1940 Rev. Mod. Phys. 12 87
10. Amemiya H 1997 J. Phys. Soc. Japan 66 1335
11. Lieberman M A and Lichtenberg J J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) p 39
12. Amemiya H 1998 J. Phys. Soc. Japan 67 1955
13. Godyak V A and Maximov V N 1977 Vestn. Mask. Univ. 3 18 51
14. Godyak V A 1986 Soviet Radio Frequency Discharge Research (Falls Church, VA: Delphic)
15. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley) p 80
16. Straub H C, Renault P, Lindsay B G, Smith K A and Stebbings R F 1995 Phys. Rev. A 52 1115
17. Tachibana K 1986 Phys. Rev. A 34 1007
18. Eggarter E 1975 J. Chem. Phys. 62 833
19. Miller P A, Hebner G A, Greenberg K E, Pochan P D and Aragon B P 1995 J. Res. Natl Inst. Stand. Technol. 100 427