Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo

Journal of Applied Physics

Volumn 103, Issue 3, 2008, Pages

  Shimada, Masashi ^a   Tynan, George R ^a   Cattolica, Robert ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRANSFER; GAS HEATING; MONTE CARLO METHODS; PLASMA DENSITY;

ELECTROSTATIC PLASMA; HIGH DENSITY PLASMA SOURCES; PLASMA PRESSURE;

PLASMAS;

EID: 39349093696     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2836938     Document Type: Article

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