Optical interferometric displacement calibration and thermomechanical noise detection in bulk focused ion beam-fabricated nanoelectromechanical systems

Journal of Micromechanics and Microengineering

Volumn 20, Issue 11, 2010, Pages

  Hiebert, W K ^a   Vick, D ^a   Sauer, V ^a,b   Freeman, M R ^a,b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION METHOD; DEVICE LAYERS; DISPLACEMENT CALIBRATION; DISPLACEMENT MEASUREMENTS; DOUBLY CLAMPED BEAM; FABRICATION TECHNIQUE; FREE-SPACE OPTICAL; ION IMPINGEMENT; LARGE AMPLITUDE; MECHANICAL DEVICE; NANO ELECTROMECHANICAL SYSTEMS; NANO SCALE; NANOMACHINING; NEMS DEVICES; OPTICAL INTERFEROMETRIC DISPLACEMENT DETECTION; OPTICAL INTERFEROMETRIC TECHNIQUE; ORTHOGONAL DIRECTIONS; OSCILLATORY MOTION; STATE OF THE ART; THERMOMECHANICAL NOISE;

CALIBRATION; CONCURRENT ENGINEERING; DETECTORS; FABRICATION; FOCUSED ION BEAMS; IONS; JOB ANALYSIS; NEMS; RAPID PROTOTYPING; THERMOMECHANICAL TREATMENT;

INTERFEROMETRY;

EID: 78649721949     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/11/115038     Document Type: Article

References (40)

1. Naik A K, Hanay M S, Hiebert W K, Feng X L and Roukes M L 2009 Towards single-molecule nanomechanical mass spectrometry Nature Nanotech. 4 445-50
2. Rugar D, Budakian R, Mamin H J and Chui B W 2004 Single spin detection by magnetic resonance force microscopy Nature 430 329-32
3. Rocheleau T, Ndukum T, Macklin C, Hertzberg J B, Clerk A A and Schwab K C 2010 Preparation and detection of a mechanical resonator near the ground state of motion Nature 463 72-5
4. O'Connell A D et al 2010 Quantum ground state and single-phonon control of a mechanical resonator Nature 464 697-703
5. Ekinci K L 2005 Electromechanical transducers at the nanoscale: actuation and sensing of motion in nanoelectromechanical systems (NEMS) Small 1 786-97
6. Rugar D, Mamin H J, Erlandsson R, Stern J e and Terris B D 1988 Force microscope using a fiberoptic displacement sensor Rev. Sci. Instrum. 59 2337-40
7. Nichol J M, Hemesath e R, Lincoln J L and Budakian R 2008 Displacement detection of silicon nanowires by polarization-enhanced fiber-optic interferometry Appl. Phys. Lett. 93 193110
8. Carr D W, Sekaric L and Craighead H G 1998 Measurement of nanomechanical resonant structures in single-crystal silicon J. Vac. Sci. Technol. B 16 3821-4
9. Kouh T, Karabacak D, Kim D H and Ekinci K L 2005 Diffraction effects in optical interferometric displacement detection in nanoelectromechanical systems Appl. Phys. Lett. 86 013106
10. Belov M, Quitoriano N J, Sharma S, Hiebert W K, Kamins T I and Evoy S 2008 Mechanical resonance of clamped silicon nanowires measured by optical interferometry J. Appl. Phys. 103 074304
11. Liu N et al 2008 Time-domain control of ultra-high frequency nanomechanical systems Nature Nanotech. 3 715-9
12. Kippenberg T J and Vahala K J 2008 Cavity optomechanics: back-action at the mesoscale Science 321 1172-6
13. Li M, Pernice W H P, Xiong C, Beahr-Jones T, Hochberg M and Tang H X 2008 Harnessing optical forces in integrated photonic circuits Nature 456 480-4
14. Eichenfield M, Camacho R, Chan J, Vahala K and Painter O 2009 A picogram-and nanometre-scale photonic-crystal optomechanical cavity Nature 459 550-5
15. Teufel J D, Donner T, Castellanos-Beltran M A, Harlow J W and Lehnert K W 2009 Nanomechanical motion measured with an imprecision below that at the standard quantum limit Nature Nanotech. 4 820-823
16. Eichenfield M, Chan J, Camacho R M, Vahala K J and Painter O 2009 Optomechanical crystals Nature 462 78-82
17. Vick D, Sauer V, Fraser A E, Freeman M R and Hiebert W K 2010 Bulk focused ion beam fabrication with three-dimensional shape control of nanoelectromechanical systems J. Micromech. Microeng. 20 105005
18. Tseng A A 2005 Recent developments in nanofabrication using focused ion beams Small 1 924-39
19. Gierak J 2009 Focused ion beam technology and ultimate applications Semicond. Sci. Technol. 24 043001
20. Ghatnekar-Nilsson S, Graham J, Hull R and Montelius L 2006 Multi-frequency response from a designed array of micromechanical cantilevers fabricated using a focused ion beam Nanotechnology 17 5233-7
21. Datskos P G and Thundat T 2002 Nanocantilever signal transduction by electron transfer J. Nanosci. Nanotech. 2 369-73
22. Brugger J, Beljakovic G, Despont M, de Rooij N F and Vettiger P 1997 Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching Microelectron. Eng. 35 401-4
23. Scheible D V, Qin J, Kim H-S and Blick R H 2007 Fabrication of doped nano-electromechanical systems Phys. Status Solidi (RRL) 1 205-7
24. Prewett P D, Anthony C J, Cheneler D and Ward M C L 2008 Stress-induced curvature of focused ion beam fabricated microcantilevers Micro. Nano Lett. 3 25-8
25. Karabacak D, Kouh T and Ekinci K L 2005 Analysis of optical interferometric displacement detection in nanoelectromechanical systems J. Appl. Phys. 98 124309
26. Bunch J S, van der Zande A M, Verbridge S S, Frank I W, Tanenbaum D M, Parpia J M, Craighead H G and McEuen P L 2007 Electromechanical resonators from graphene sheets Science 315 490-3
27. Hart C 2008 Thermomechanical noise measurements of very high frequency (VHF) nanomechanical resonators MS Thesis Dissertation Boston University College of Engineering
28. Karabalin R B, Matheny M H, Feng X L, Defay E, Le Rhun G, Marcoux C, Hentz S, Adnreucci P and Roukes M L 2009 Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films Appl. Phys. Lett. 95 103111
29. Svitelskiy O, Liu N, Sauer V, Cheng K-M, Finley E, Belov M, Freeman M R and Hiebert W K 2008 A simple cell for the analysis of nanoelectromechanical systems under gas pressure Rev. Sci. Instrum. 79 093701
30. Cleland A N 2003 Foundations of Nanomechanics: From Solid-State Theory to Device Applications (Berlin: Springer)
31. Yurke B, Greywall D S, Pargellis A N and Busch P A 1995 Theory of amplifier-noise evasion in an oscillator employing a nonlinear resonator Phys. Rev. A 51 4211-29
32. Postma H W Ch, Kozinsky I, Husain A and Roukes M L 2005 Dynamic range of nanotube-and nanowire-based electromechanical systems Appl. Phys. Lett. 86 223105
33. Aldridge J S and Cleland A N 2005 Noise-enabled precision measurements of a Duffing nanomechanical resonator Phys. Rev. Lett. 94 156403
34. Kozinsky I, Postma H W Ch, Bargatin I and Roukes M L 2006 Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators Appl. Phys. Lett. 88 253101
35. Buks e and Yurke B 2006 Mass detection with a nonlinear nanomechanical resonator Phys. Rev. e 74 046619
36. Zhang W and Turner K L 2005 Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor Sensors Actuators A 122 23-30
37. Almog R, Zaitsev S, Shtempluck O and Buks e 2007 Noise squeezing in a nanomechanical Duffing resonator Phys. Rev. Lett. 98 078103
38. Turner K L, Miller S A, Harwell P G, MacDonald N C, Strogatz S H and Adams S G 1998 Five parametric resonances in a microelectromechanical system Nature 396 149-51
39. Ekinci K L and Roukes M L 2005 Nanoelectromechanical systems Rev. Sci. Instrum. 76 061101
40. Sekaric L, Zalalutdinov M, Turner S W, Zehnder A T, Parpia J M and Craighead H G 2002 Nanomechanical resonant structures as tunable passive modulators of light Appl. Phys. Lett. 80 3617-9