Bulk focused ion beam fabrication with three-dimensional shape control of nanoelectromechanical systems

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Vick, D ^a   Sauer, V ^a,b   Fraser, A E ^b   Freeman, M R ^a,b   Hiebert, W K ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MATERIALS; DIMENSIONAL CONTROL; FINITE ELEMENT MODELING; FOCUSED ION BEAM MILLING; INTERFEROMETRIC MEASUREMENT; ION IMPINGEMENT; NANO ELECTROMECHANICAL SYSTEMS; NANOMACHINING; NANOSTRUCTURE FABRICATION; PROTOTYPING; THREE-DIMENSIONAL SHAPE;

FABRICATION; FOCUSED ION BEAMS; IONS; MATERIALS HANDLING EQUIPMENT; MILLING (MACHINING); NANOSTRUCTURES; NEMS;

THREE DIMENSIONAL;

EID: 78049345282     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/105005     Document Type: Article

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