SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 19, Issue 12, 2010, Pages 1461-1465

Substrate effect on the optical properties and thickness of diamond-like carbon films deposited by the RF PACVD method

(4) Smietana, M a,b Bock, W J a Szmidt, J b Grabarczyk, J c

a UNIVERSITÉ DU QUÉBEC EN OUTAOUAIS (Canada)

b WARSAW UNIVERSITY OF TECHNOLOGY (Poland)

c LODZ UNIVERSITY OF TECHNOLOGY (Poland)

Author keywords

Diamond like carbon; Optical properties; Plasma CVD; Thin films

Indexed keywords

COMPARATIVE ANALYSIS; CRYSTALLOGRAPHIC ORIENTATIONS; DEPOSITION PROCESS; DIAMOND-LIKE CARBON; DLC FILM; OXIDIZED SILICON SUBSTRATES; OXIDIZED SILICON WAFERS; PLASMA CVD; PROCESS PARAMETERS; RADIO FREQUENCY PLASMA; RF PACVD METHODS; SELF BIAS VOLTAGE; SUBSTRATE EFFECTS;

CARBON FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; THIN FILMS;

OPTICAL PROPERTIES;

EID: 78649636843 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2010.08.012 Document Type: Article

Times cited : (40)

References (35)

1
- 0037165927
- J. Robertson Mat. Sci.& Engin. R37 2002 129
- (2002) Mat. Sci.& Engin. , vol.37 , pp. 129
- Robertson, J.¹

2
- 58149326304
- S. Mitura, E. Mitura, and A. Mitura Diam. Relat. Mater. 4 1995 302
- (1995) Diam. Relat. Mater. , vol.4 , pp. 302
- Mitura, S.¹ Mitura, E.² Mitura, A.³

3
- 0032629103
- A. Grill IBM J. Res. Develop. 43 1999 147
- (1999) IBM J. Res. Develop. , vol.43 , pp. 147
- Grill, A.¹

4
- 27844491573
- A. Shirakura, M. Nakaya, Y. Koga, H. Kodama, T. Hasebe, and T. Suzuki Thin Solid Films 494 2006 84
- (2006) Thin Solid Films , vol.494 , pp. 84
- Shirakura, A.¹ Nakaya, M.² Koga, Y.³ Kodama, H.⁴ Hasebe, T.⁵ Suzuki, T.⁶

5
- 0034318489
- L. Martinu, and D. Poitras J. Vac. Sci. Technol. A 18 2000 2619
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2619
- Martinu, L.¹ Poitras, D.²

6
- 2442476226
- I. Ahmad, P.D. Maguire, P. Lemoine, S.S. Roy, and J.A. McLaughlin Diam. Relat. Mater. 13 2004 1346
- (2004) Diam. Relat. Mater. , vol.13 , pp. 1346
- Ahmad, I.¹ Maguire, P.D.² Lemoine, P.³ Roy, S.S.⁴ McLaughlin, J.A.⁵

7
- 22844436723
- S.-J. Cho, J.-W. Chung, and K.-R. Lee Diam. Relat. Mater. 14 2005 1270
- (2005) Diam. Relat. Mater. , vol.14 , pp. 1270
- Cho, S.-J.¹ Chung, J.-W.² Lee, K.-R.³

8
- 42949123193
- E. Salgueiredo, M. Vila, M.A. Silva, M.A. Lopes, J.D. Santos, F.M. Costa, R.F. Silva, P.S. Gomes, and M.H. Fernandes Diam. Relat. Mater. 17 2008 878
- (2008) Diam. Relat. Mater. , vol.17 , pp. 878
- Salgueiredo, E.¹ Vila, M.² Silva, M.A.³ Lopes, M.A.⁴ Santos, J.D.⁵ Costa, F.M.⁶ Silva, R.F.⁷ Gomes, P.S.⁸ Fernandes, M.H.⁹

9
- 0035449308
- Q. Zhang, S.F. Yoon, S. Zhgoon, V. Ligatchev, M.B. Yu, and J. Ahn Diam. Relat. Mater. 10 2001 1843
- (2001) Diam. Relat. Mater. , vol.10 , pp. 1843
- Zhang, Q.¹ Yoon, S.F.² Zhgoon, S.³ Ligatchev, V.⁴ Yu, M.B.⁵ Ahn, J.⁶

10
- 34247160845
- P. Lemoine, J.P. Quinn, P.D. Maguire, J.F. Zhao, and J.A. McLaughlin Appl. Surf. Sci. 253 2007 6165
- (2007) Appl. Surf. Sci. , vol.253 , pp. 6165
- Lemoine, P.¹ Quinn, J.P.² Maguire, P.D.³ Zhao, J.F.⁴ McLaughlin, J.A.⁵

11
- 85058247866
- K. Donnelly, D.P. Dowling, M.L. McConnell, and M. Mooney Thin Solid Films 394 2001 102
- (2001) Thin Solid Films , vol.394 , pp. 102
- Donnelly, K.¹ Dowling, D.P.² McConnell, M.L.³ Mooney, M.⁴

12
- 67349095059
- M. Ban, and T. Yuhara Surf. Coat. Tech. 203 2009 2587
- (2009) Surf. Coat. Tech. , vol.203 , pp. 2587
- Ban, M.¹ Yuhara, T.²

13
- 33746671937
- D.S. Jones, C.P. Garvin, D. Dowling, K. Donnelly, and S.P. Gorman J. Biomed. Mater. Res. B Appl. Biomater. 78B 2006 230
- (2006) J. Biomed. Mater. Res. B Appl. Biomater. , vol.78 , pp. 230
- Jones, D.S.¹ Garvin, C.P.² Dowling, D.³ Donnelly, K.⁴ Gorman, S.P.⁵

14
- 0037309820
- A. Grill Diam. Relat. Mater. 12 2003 166
- (2003) Diam. Relat. Mater. , vol.12 , pp. 166
- Grill, A.¹

15
- 67349146057
- F.R. Marciano, L.F. Bonetti, L.V. Santos, N.S. Da-Silva, E.J. Corat, and V.J. Trava-Airoldi Diam. Relat. Mater. 18 2009 1010
- (2009) Diam. Relat. Mater. , vol.18 , pp. 1010
- Marciano, F.R.¹ Bonetti, L.F.² Santos, L.V.³ Da-Silva, N.S.⁴ Corat, E.J.⁵ Trava-Airoldi, V.J.⁶

16
- 0037197330
- M. Gioti, S. Logothetidis, C. Charitidis, Y. Panayiotatos, and I. Varsano Sensors Actuators A 99 2002 35
- (2002) Sensors Actuators A , vol.99 , pp. 35
- Gioti, M.¹ Logothetidis, S.² Charitidis, C.³ Panayiotatos, Y.⁴ Varsano, I.⁵

17
- 36249032412
- Z. Gu, and Y. Xu Meas. Sci. Technol. 18 2007 3530
- (2007) Meas. Sci. Technol. , vol.18 , pp. 3530
- Gu, Z.¹ Xu, Y.²

18
- 67349158640
- M.H. Oliveira Jr., D.S. Silva, A.D.S. Cortes, M.A.B. Namani, and F.C. Marques Diam. Relat. Mater. 18 2009 1028
- (2009) Diam. Relat. Mater. , vol.18 , pp. 1028
- Oliveira Jr., M.H.¹ Silva, D.S.² Cortes, A.D.S.³ Namani, M.A.B.⁴ Marques, F.C.⁵

19
- 2442430436
- M. Smietana, J. Szmidt, M. Dudek, and P. Niedzielski Diam. Relat. Mater. 13 2004 954
- (2004) Diam. Relat. Mater. , vol.13 , pp. 954
- Smietana, M.¹ Szmidt, J.² Dudek, M.³ Niedzielski, P.⁴

20
- 34047262174
- M. Smietana, J. Szmidt, M.L. Korwin-Pawlowski, W.J. Bock, and J. Grabarczyk Diam. Relat. Mater. 16 2007 1374
- (2007) Diam. Relat. Mater. , vol.16 , pp. 1374
- Smietana, M.¹ Szmidt, J.² Korwin-Pawlowski, M.L.³ Bock, W.J.⁴ Grabarczyk, J.⁵

21
- 48849100761
- M. Smietana, M.L. Korwin-Pawlowski, W.J. Bock, G.R. Pickrell, and J. Szmidt Meas. Sci. Technol. 19 2008 085301
- (2008) Meas. Sci. Technol. , vol.19 , pp. 085301
- Smietana, M.¹ Korwin-Pawlowski, M.L.² Bock, W.J.³ Pickrell, G.R.⁴ Szmidt, J.⁵

22
- 20744444579
- J. Tian, Q. Zhang, Q. Zhou, R. Gruenwald, M. Huesgen, S.F. Yoon, and J. Ahn Surf. Coat. Tech. 198 2005 198
- (2005) Surf. Coat. Tech. , vol.198 , pp. 198
- Tian, J.¹ Zhang, Q.² Zhou, Q.³ Gruenwald, R.⁴ Huesgen, M.⁵ Yoon, S.F.⁶ Ahn, J.⁷

23
- 35548929785
- V.J. Trava-Airoldi, L.F. Bonetti, G. Capote, L.V. Santos, and E.J. Corat Surf. Coat. Tech. 202 2007 549
- (2007) Surf. Coat. Tech. , vol.202 , pp. 549
- Trava-Airoldi, V.J.¹ Bonetti, L.F.² Capote, G.³ Santos, L.V.⁴ Corat, E.J.⁵

24
- 22944479335
- P. Patsalas, S. Logothetidis, and P.C. Kelires Diam. Relat. Mater. 14 2005 1241
- (2005) Diam. Relat. Mater. , vol.14 , pp. 1241
- Patsalas, P.¹ Logothetidis, S.² Kelires, P.C.³

25
- 20244365288
- D.W. Han, S.M. Jeong, H.K. Baik, S.J. Lee, N.C. Yang, and D.H. Suh Thin Solid Films 420-421 2002 190
- (2002) Thin Solid Films , vol.420-421 , pp. 190
- Han, D.W.¹ Jeong, S.M.² Baik, H.K.³ Lee, S.J.⁴ Yang, N.C.⁵ Suh, D.H.⁶

26
- 10644281065
- J. Tian, Q. Zhang, Q. Zhou, S.F. Yoon, J. Ahn, S.G. Wang, J.Q. Li, and D.J. Yang Appl. Surf. Sci. 239 2005 255
- (2005) Appl. Surf. Sci. , vol.239 , pp. 255
- Tian, J.¹ Zhang, Q.² Zhou, Q.³ Yoon, S.F.⁴ Ahn, J.⁵ Wang, S.G.⁶ Li, J.Q.⁷ Yang, D.J.⁸

27
- 48849087898
- M. Smietana, J. Szmidt, M.L. Korwin-Pawlowski, N. Miller, and A.A. Elmustafa Diam. Relat. Mater. 17 2008 1655
- (2008) Diam. Relat. Mater. , vol.17 , pp. 1655
- Smietana, M.¹ Szmidt, J.² Korwin-Pawlowski, M.L.³ Miller, N.⁴ Elmustafa, A.A.⁵

28
- 0032144247
- K.J. Clay, S.P. Speakman, N.A. Morrison, N. Tomozeiu, W.I. Milne, and A. Kapoor Diam. Relat. Mater. 7 1998 1100
- (1998) Diam. Relat. Mater. , vol.7 , pp. 1100
- Clay, K.J.¹ Speakman, S.P.² Morrison, N.A.³ Tomozeiu, N.⁴ Milne, W.I.⁵ Kapoor, A.⁶

29
- 17644418741
- R. Clergereaux, D. Escaich, S. Martin, F. Gaillard, and P. Raynaud Thin Solid Films 482 2005 216
- (2005) Thin Solid Films , vol.482 , pp. 216
- Clergereaux, R.¹ Escaich, D.² Martin, S.³ Gaillard, F.⁴ Raynaud, P.⁵

30
- 72049094074
- M. Smietana, M.L. Korwin-Pawlowski, J. Grabarczyk, and J. Szmidt Mater. Sci. Eng. B 165 2009 132
- (2009) Mater. Sci. Eng. B , vol.165 , pp. 132
- Smietana, M.¹ Korwin-Pawlowski, M.L.² Grabarczyk, J.³ Szmidt, J.⁴

31
- 17044382183
- N. Maitre, S. Camelio, A. Barranco, Th. Girardeau, and E. Breelle J. NonCrystalline Solids 351 2005 877
- (2005) J. NonCrystalline Solids , vol.351 , pp. 877
- Maitre, N.¹ Camelio, S.² Barranco, A.³ Girardeau, T.⁴ Breelle, E.⁵

32
- 32144459568
- Y. Lifshitz, S.R. Kasi, J.W. Rabalais, and W. Eckstein Phys. Rev. B 41 1990 10468
- (1990) Phys. Rev. B , vol.41 , pp. 10468
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³ Eckstein, W.⁴

33
- 18444375916
- R. McCann, S.S. Roy, P. Papakonstantinou, G. Abbas, and J.A. McLaughlin Diam. Relat. Mater. 14 2005 983
- (2005) Diam. Relat. Mater. , vol.14 , pp. 983
- McCann, R.¹ Roy, S.S.² Papakonstantinou, P.³ Abbas, G.⁴ McLaughlin, J.A.⁵

34
- 22944440381
- E.V. Barnata, and G.A. Hebner J. Appl. Phys. 98 2005 13305
- (2005) J. Appl. Phys. , vol.98 , pp. 13305
- Barnata, E.V.¹ Hebner, G.A.²

35
- 0037098033
- G.A. Hebner, and I.C. Abraham J. Appl. Phys. 91 2002 9539
- (2002) J. Appl. Phys. , vol.91 , pp. 9539
- Hebner, G.A.¹ Abraham, I.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.