Properties of diamond-like carbon films on crystalline quartz and lithium niobate

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1843-1845

  Zhang, Q ^a   Yoon, S F ^a   Zhgoon, S ^b   Ligatchev, V ^a   Yu, M B ^a   Ahn, J ^a   Rusli, ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b MOSCOW POWER ENGINEERING INSTITUTE   (Russian Federation)

Author keywords

Diamond like carbon films; Surface acoustic wave; Tetrahedral amorphous carbon films

Indexed keywords

HARDNESS; LITHIUM NIOBATE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUARTZ; RAMAN SCATTERING;

INTENSITY RATIO;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035449308     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00463-0     Document Type: Article

References (11)