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Applied Surface Science

Volumn 239, Issue 3-4, 2005, Pages 255-258

Study of well adherent DLC film deposited on piezoelectric LiTaO 3 substrate

(8) Tian, Jingze a Zhang, Qing a Zhou, Q a Yoon, S F a Ahn, J a Wang, S G a Li, J Q a Yang, D J a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

DLC; Nano indentation; PECVD; Scratch test

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIAMONDS; ELASTIC MODULI; HYDROGENATION; MECHANICAL PROPERTIES; PIEZOELECTRIC MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SILICA; TANTALUM COMPOUNDS; THIN FILMS;

DIAMOND-LIKE CARBON (DLC); MASS DENSITY; NANO-INDENTATION; SCRATCH TEST;

LITHIUM COMPOUNDS;

EID: 10644281065 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.05.288 Document Type: Article

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.