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Volumn 482, Issue 1-2, 2005, Pages 216-220

Aging of plasma-deposited carbon layers: Effect of their thickness and material structure

Author keywords

Aging; Carbon layer; Plasma deposition; Structural properties

Indexed keywords

AGING OF MATERIALS; ANODES; CAPACITANCE; CATHODES; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONICS; OXIDATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

EID: 17644418741     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.148     Document Type: Conference Paper
Times cited : (10)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.