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Volumn 482, Issue 1-2, 2005, Pages 216-220
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Aging of plasma-deposited carbon layers: Effect of their thickness and material structure
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Author keywords
Aging; Carbon layer; Plasma deposition; Structural properties
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Indexed keywords
AGING OF MATERIALS;
ANODES;
CAPACITANCE;
CATHODES;
ELLIPSOMETRY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
MICROELECTRONICS;
OXIDATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THIN FILMS;
CARBON LAYERS;
PLASMA DEPOSITION;
SPECTROSCOPIC ELLIPSOMETRY (SE);
STRUCTURAL PROPERTIES;
CARBON;
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EID: 17644418741
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2004.11.148 Document Type: Conference Paper |
Times cited : (10)
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References (12)
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