A comparison of DLC film properties obtained by r.f. PACVD, IBAD, and enhanced pulsed-DC PACVD

Surface and Coatings Technology

Volumn 202, Issue 3, 2007, Pages 549-554

  Trava Airoldi, V J ^a   Bonetti, L F ^a,b   Capote, G ^a   Santos, L V ^a   Corat, E J ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

Author keywords

Adhesion; Chemical vapor deposition; Diamond like carbon; Friction coefficient; Mechanical properties; Plasma assisted deposition

Indexed keywords

ADHESION; DEPOSITION RATES; FRICTION; GROWTH RATE; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESSES; TITANIUM ALLOYS;

DEGREE OF HARDNESS; FRICTION COEFFICIENT;

DIAMOND LIKE CARBON FILMS;

ADHESION; DEPOSITION RATES; DIAMOND LIKE CARBON FILMS; FRICTION; GROWTH RATE; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESSES; TITANIUM ALLOYS;

EID: 35548929785     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.06.030     Document Type: Article

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