Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1346-1349

  Ahmad, I ^a   Maguire, P D ^a   Lemoine, P ^a   Roy, S S ^a   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

Diamond like carbon; Filtered cathodic vacuum arc; PECVD; Unbalanced magnetron sputtering

Indexed keywords

CARBON NANOTUBES; DEPOSITION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SEPARATORS; SUBSTRATES; VACUUM;

FILTERED CATHODIC VACUUM ARC (FCVA); KELVIN PROBE; WORK FUNCTION;

THIN FILMS;

DIAMOND;

EID: 2442476226     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.11.026     Document Type: Article

References (16)

1. Andersson L.P. Thin Solid Films 86 1981 193
2. Aisenberg S. J. Vac. Sci. Technol. A 2 1984 369
3. Weiler M. Sattel S. Geissen T. Jung K. Ehrhardt H. Veerasamy V.S.et al. Phys. Rev. B 53 1996 1594
4. Yin Y. Mckenzie D.R. Zou J. Das A. J. Appl. Phys. 79 1996 1563
5. Robertson J. Diam. Relat. Mater. 3 1994 361
6. Grill A. Diam. Relat. Mater. 8 1999 428
7. Grill A. Surf. Coat. Technol. 9495 1997 507
8. Zarrabian M. Fourches-Coulon N. Turban G. Lancin M. Marchic C. Diam. Relat. Mater. 6 1997 542
9. Ferrari A.C. Robertson J. Phys. Rev. B 61 2000 14095
10. Gilkes K.W.R. Prawer S. Nugent K.W. Robertson J. Sands H.S. Lifshitz Y. Shi X. J. Appl. Phys. 87 2000 7283
11. Moskovits M. Rev. Mod. Phys. 57 1985 783
12. Jacob W. Thin Solid Films 326 1998 1-42
13. M. Shinohara, D. Shoji, T. Maehama, Y. Akama, M. Niwano, Electronics and Communication in Japan, Part 2, 85 59-65
14. Lemoine P. Lamberton R.W. Ogwu A.A. Zhao J.F. Maguire P. McLaughlin J. J. Appl. Phys. 86 1999 6564
15. Grossman E. Appl. Phys. Lett. 68 1996 1214
16. Uhlmann S. Frauenheim Th. Lifshitz Y. Phys. Rev. Lett. 81 1998 641