Intrinsic mechanical properties of ultra-thin amorphous carbon layers

Applied Surface Science

Volumn 253, Issue 14, 2007, Pages 6165-6175

  Lemoine, P ^a   Quinn, J P ^a   Maguire, P D ^a   Zhao, J F ^a   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

Amorphous hydrogenated amorphous carbon; Hardness; Tetrahedral amorphous carbon

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; FILM GROWTH; FILM THICKNESS; HARDNESS; REFRACTIVE INDEX;

AMORPHOUS HYDROGENATED AMORPHOUS CARBON; CARBON COATINGS; X RAY REFLECTOMETRY;

DIAMOND LIKE CARBON FILMS;

EID: 34247160845     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.028     Document Type: Article

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