The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C:N films

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 983-988

  McCann, R ^a   Roy, S S ^a   Papakonstantinou, P ^a   Abbas, G ^a   McLaughlin, J A ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

Tetrahedral carbon; Thickness; Vibrational spectroscopies; XRR

Indexed keywords

AMORPHOUS FILMS; COMPOSITION; MOLECULAR VIBRATIONS; RAMAN SPECTROSCOPY; SUBSTRATES; SYNTHESIS (CHEMICAL); VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

FILTERED CATHODIC VACUUM ARC (FCVA); TETRAHEDRAL CARBON; THICKNESS; VIBRATIONAL SPECTROSCOPIES; XRR;

DIAMOND LIKE CARBON FILMS;

EID: 18444375916     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.037     Document Type: Conference Paper

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