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Volumn 14, Issue 8, 2005, Pages 1270-1276

Characterization of the mechanical properties of diamond-like carbon films

Author keywords

Diamond like carbon; Elastic modulus; Residual compressive stress; Structural evolution

Indexed keywords

AMORPHOUS MATERIALS; CARBON; COMPRESSIVE STRESS; DEPOSITION; ELASTIC MODULI; ELASTICITY; HARDNESS; HYDROGENATION; INDENTATION; NANOTECHNOLOGY; STRESS RELAXATION; THIN FILMS;

EID: 22844436723     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.11.034     Document Type: Conference Paper
Times cited : (17)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.