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Volumn 14, Issue 8, 2005, Pages 1270-1276
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Characterization of the mechanical properties of diamond-like carbon films
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Author keywords
Diamond like carbon; Elastic modulus; Residual compressive stress; Structural evolution
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Indexed keywords
AMORPHOUS MATERIALS;
CARBON;
COMPRESSIVE STRESS;
DEPOSITION;
ELASTIC MODULI;
ELASTICITY;
HARDNESS;
HYDROGENATION;
INDENTATION;
NANOTECHNOLOGY;
STRESS RELAXATION;
THIN FILMS;
DIAMOND-LIKE CARBON (DLC) FILMS;
NANOINDENTATION;
RESIDUAL COMPRESSIVE STRESS;
STRUCTURAL EVOLUTION;
DIAMOND LIKE CARBON FILMS;
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EID: 22844436723
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2004.11.034 Document Type: Conference Paper |
Times cited : (17)
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References (20)
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