메뉴 건너뛰기




Volumn 31, Issue 10, 2010, Pages

Nanoscale strained-Si MOSFET physics and modeling approaches: A review

Author keywords

Mobility; SiGe; Strained Si; Technology CAD

Indexed keywords

ANALYTICAL MODEL; DEVICE MODELS; EFFECT OF STRAIN; MOBILITY; MODELING APPROACH; NANO SCALE; NANOSCALE MOSFETS; POTENTIAL BENEFITS; SIGE; STRAINED SILICON; STRAINED-SI; TECHNOLOGY CAD;

EID: 78649434377     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/31/10/104001     Document Type: Review
Times cited : (18)

References (39)
  • 1
    • 0031166167 scopus 로고    scopus 로고
    • MOORE'S law: Past, present and future
    • June
    • Schaller R R. MOORE'S law: past, present and future. IEEE Spectrum, June 1997: 53
    • (1997) IEEE Spectrum , pp. 53
    • Schaller, R.R.1
  • 2
    • 0031696792 scopus 로고    scopus 로고
    • Cramming more components onto integrated circuits
    • Moore G E. Cramming more components onto integrated circuits. Proc IEEE, 1998, 86(1): 82
    • (1998) Proc IEEE , vol.86 , Issue.1 , pp. 82
    • Moore, G.E.1
  • 3
    • 13644284230 scopus 로고    scopus 로고
    • A perspective from the 2003 ITRSMOSFET scaling trends, challenges and potential solutions
    • Zeitoff P M, Chung J E. A perspective from the 2003 ITRSMOSFET scaling trends, challenges and potential solutions. IEEE Circuits and Devices Magazine, 2005: 4
    • (2005) IEEE Circuits and Devices Magazine , pp. 4
    • Zeitoff, P.M.1    Chung, J.E.2
  • 4
    • 78649402172 scopus 로고    scopus 로고
    • International technology roadmap for semiconductors (ITRS). Semiconductor International Association, 2003
    • International technology roadmap for semiconductors (ITRS). Semiconductor International Association, 2003
  • 5
    • 0003532560 scopus 로고    scopus 로고
    • Norwell MA: Kluwer Academic Publishers
    • Senturia S D. Microsystem design. Norwell, MA: Kluwer Academic Publishers, 2001
    • (2001) Microsystem Design
    • Senturia, S.D.1
  • 9
    • 0000741169 scopus 로고    scopus 로고
    • Comparative study of phononlimited mobility of two-dimensional electrons in strained and unstrained Si metal-oxide-semiconductor field-effect transistors
    • Takagi S, Hoyt J, Welser J, et al. Comparative study of phononlimited mobility of two-dimensional electrons in strained and unstrained Si metal-oxide-semiconductor field-effect transistors. J Appl Phys, 1996, 80: 1567
    • (1996) J Appl Phys , vol.80 , pp. 1567
    • Takagi, S.1    Hoyt, J.2    Welser, J.3
  • 10
    • 0028758513 scopus 로고
    • Strain dependence of the performance enhancement in strained-Si n-MOSFETs
    • Welser J, Hoyt J, Takagi S. Strain dependence of the performance enhancement in strained-Si n-MOSFETs. IEDM Technical Digest, 1994: 373
    • (1994) IEDM Technical Digest , pp. 373
    • Welser, J.1    Hoyt, J.2    Takagi, S.3
  • 11
    • 78649432550 scopus 로고    scopus 로고
    • http://www.sematech.org
  • 12
    • 0032041499 scopus 로고    scopus 로고
    • Strained-Si channel heterojunction p- MOSFETS
    • Armstrong G, Maiti C. Strained-Si channel heterojunction p- MOSFETS. Solid-State Electron, 1998, 42(4): 487
    • (1998) Solid-State Electron , vol.42 , Issue.4 , pp. 487
    • Armstrong, G.1    Maiti, C.2
  • 13
    • 0043269756 scopus 로고    scopus 로고
    • Six-band k-p calculation of the hole mobility in silicon inversion layers: Dependence on surface orientation, strain, and silicon thickness
    • Fischetti M V, Ren Z, Solomon P M, et al. Six-band k-p calculation of the hole mobility in silicon inversion layers: dependence on surface orientation, strain, and silicon thickness. J Appl Phys, 2003, 94: 1079
    • (2003) J Appl Phys , vol.94 , pp. 1079
    • Fischetti, M.V.1    Ren, Z.2    Solomon, P.M.3
  • 14
    • 0037115552 scopus 로고    scopus 로고
    • On the enhanced electron mobility in strained-silicon inversion layers
    • Fischetti M V, Gámiz F, Hänsch W. On the enhanced electron mobility in strained-silicon inversion layers. Appl Phys Lett, 2002, 92: 7320
    • (2002) Appl Phys Lett , vol.92 , pp. 7320
    • Fischetti, M.V.1    Gámiz, F.2    Hänsch, W.3
  • 15
    • 0001038893 scopus 로고    scopus 로고
    • Band structure, deformation potentials, and carrier mobility in strained-Si, Ge, and SiGe alloys
    • Fischetti M V, Laux S E. Band structure, deformation potentials, and carrier mobility in strained-Si, Ge, and SiGe alloys. J Appl Phys, 1996, 80: 2234
    • (1996) J Appl Phys , vol.80 , pp. 2234
    • Fischetti, M.V.1    Laux S, E.2
  • 16
    • 0000363279 scopus 로고    scopus 로고
    • Subband structure and mobility of two-dimensional holes in strained-Si/SiGe MOSFETs
    • Oberhuber R, Zandler G, Vogl P. Subband structure and mobility of two-dimensional holes in strained-Si/SiGe MOSFETs. Phys Rev B, 1998, 58: 9941
    • (1998) Phys Rev B , vol.58 , pp. 9941
    • Oberhuber, R.1    Zandler, G.2    Vogl, P.3
  • 17
    • 78649436313 scopus 로고    scopus 로고
    • Scaling planar devices focussing on planar device structures and strained silicon for handling silicon issues in the deep sub-100 nm regime
    • Chuang C, Bernstein K, Joshi R V, et al. Scaling planar devices focussing on planar device structures and strained silicon for handling silicon issues in the deep sub-100 nm regime. IEEE J Electron Circuits Devices, 2004, 20(1): 16
    • (2004) IEEE J Electron Circuits Devices , vol.20 , Issue.1 , pp. 16
    • Chuang, C.1    Bernstein, K.2    Joshi, R.V.3
  • 19
    • 0033357510 scopus 로고    scopus 로고
    • Perspectives on analytical modeling of small geometry MOSFETs in SPICE for low voltage/low power CMOS circuit design
    • Foty D. Perspectives on analytical modeling of small geometry MOSFETs in SPICE for low voltage/low power CMOS circuit design. Journal of Analog Integrated Circuits and Signal Processing, 1999, 21: 229
    • (1999) Journal of Analog Integrated Circuits and Signal Processing , vol.21 , pp. 229
    • Foty, D.1
  • 21
    • 4444281994 scopus 로고    scopus 로고
    • SP: An advanced surfacepotential-based compact MOSFET model
    • Gildenblat G, Wang H, Chen T L, et al. SP: an advanced surfacepotential- based compact MOSFET model. IEEE J Solid-State Circuits, 2004, 39(9): 1394
    • (2004) IEEE J Solid-State Circuits , vol.39 , Issue.9 , pp. 1394
    • Gildenblat, G.1    Wang, H.2    Chen, T.L.3
  • 22
    • 6344243665 scopus 로고    scopus 로고
    • HiSIM: Selfconsistent surface-potential MOS model valid down to sub-100 nm technologies
    • April
    • Miura-Mattausch M, Ueno H, Mattausch H J, et al. HiSIM: selfconsistent surface-potential MOS model valid down to sub-100 nm technologies. MSM Workshop, April 2002
    • (2002) MSM Workshop
    • Miura-Mattausch, M.1    Ueno, H.2    Mattausch, H.J.3
  • 23
    • 78649393389 scopus 로고    scopus 로고
    • HiSIM 1.1.1 User's manual. Semiconductor Technology Academic Research Centre (STARC)
    • HiSIM 1.1.1 User's manual. Semiconductor Technology Academic Research Centre (STARC)
  • 25
    • 0029342165 scopus 로고
    • An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications
    • Enz C, Krummenacher F, Vittoz E. An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications. Journal of Analog Integrated Circuit Signal Processing, 1995, 8: 83
    • (1995) Journal of Analog Integrated Circuit Signal Processing , vol.8 , pp. 83
    • Enz, C.1    Krummenacher, F.2    Vittoz, E.3
  • 27
    • 63449084868 scopus 로고    scopus 로고
    • The use of stressed silicon in MOS transistors and CMOS structures
    • Neizvestnyi I, Gridchin V. The use of stressed silicon in MOS transistors and CMOS structures. Journal of Russian Microelectronics, 2009, 38(2): 83
    • (2009) Journal of Russian Microelectronics , vol.38 , Issue.2 , pp. 83
    • Neizvestnyi, I.1    Gridchin, V.2
  • 28
    • 0035471976 scopus 로고    scopus 로고
    • Strained-Si on Si1-xGex MOSFET inversion layer centroid modeling
    • Roldan J, Gamiz F, Lopez-Villanueva J A, et al. Strained-Si on Si1-xGex MOSFET inversion layer centroid modeling. IEEE J Electron Devices, 2001, 48(10): 2447
    • (2001) IEEE J Electron Devices , vol.48 , Issue.10 , pp. 2447
    • Roldan, J.1    Gamiz, F.2    Lopez-Villanueva, J.A.3
  • 29
    • 0347354869 scopus 로고    scopus 로고
    • Simulation and comparison of MOS inversion layer quantum mechanics effects in SiGe p- MOSFET and Si PMOSFET
    • Yang R, Jinsheng L, Jing T, et al. Simulation and comparison of MOS inversion layer quantum mechanics effects in SiGe p- MOSFET and Si PMOSFET. Microelectron J, 2004, 35(2): 145
    • (2004) Microelectron J , vol.35 , Issue.2 , pp. 145
    • Yang, R.1    Jinsheng, L.2    Jing, T.3
  • 33
    • 0000662359 scopus 로고    scopus 로고
    • Electrical properties of in situ phosphorus- and boron-doped polycrystalline SiGeC films
    • Anteney I M, Parker G J, Ashburn P, et al. Electrical properties of in situ phosphorus- and boron-doped polycrystalline SiGeC films. Appl Phys Lett, 2000, 77: 561
    • (2000) Appl Phys Lett , vol.77 , pp. 561
    • Anteney, I.M.1    Parker, G.J.2    Ashburn, P.3
  • 34
    • 33845198102 scopus 로고    scopus 로고
    • Gate leakage mechanisms in strained Si devices
    • Yan L, Olsen S H, Kanoun M. Gate leakage mechanisms in strained Si devices. J Appl Phys, 2006, 100: 104507
    • (2006) J Appl Phys , vol.100 , pp. 104507
    • Yan, L.1    Olsen, S.H.2    Kanoun, M.3
  • 35
    • 31944448128 scopus 로고    scopus 로고
    • Strain induced changes in the gate tunneling currents in p-channel metal-oxide-semiconductor field effect transistors
    • Yang X, Lim J, Sun G, et al. Strain induced changes in the gate tunneling currents in p-channel metal-oxide-semiconductor field effect transistors. Appl Phys Lett, 2006, 88: 052108
    • (2006) Appl Phys Lett , vol.88 , pp. 52108
    • Yang, X.1    Lim, J.2    Sun, G.3
  • 36
    • 43949109929 scopus 로고    scopus 로고
    • Improved gate oxide integrity of strained Si n-channel metal oxide silicon field effect transistors using thin virtual substrates
    • Yan L, Olsen S H, Escobedo-Cousin E O, et al. Improved gate oxide integrity of strained Si n-channel metal oxide silicon field effect transistors using thin virtual substrates. J Appl Phys, 2008, 103: 094508
    • (2008) J Appl Phys , vol.103 , pp. 94508
    • Yan, L.1    Olsen, S.H.2    Escobedo-Cousin, E.O.3
  • 37
    • 67349198936 scopus 로고    scopus 로고
    • Strain sensitivity of gate leakage in strained-SOI nMOSFETs: A benefit for the performance tradeoff and a novel way to extract the strain induced band offset
    • Rocette F, Garros X, Reimbold G, et al. Strain sensitivity of gate leakage in strained-SOI nMOSFETs: a benefit for the performance tradeoff and a novel way to extract the strain induced band offset. J Microelectron Eng, 2009, 86: 1897
    • (2009) J Microelectron Eng , vol.86 , pp. 1897
    • Rocette, F.1    Garros, X.2    Reimbold, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.