Scanning thermal microscopy for fast multiscale imaging and manipulation

IEEE Transactions on Nanotechnology

Volumn 9, Issue 6, 2010, Pages 745-753

  Cannara, Rachel J ^a,b   Sebastian, Abu ^a   Gotsmann, Bernd ^a   Rothuizen, Hugo ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Metrology; microfabricated probes; multiscale imaging; nanomanipulation; noncontact imaging; thermal sensing

Indexed keywords

METROLOGY; MICROFABRICATED PROBES; MULTISCALES; NANOMANIPULATIONS; NONCONTACT IMAGING; THERMAL SENSING;

MICROFABRICATION; MICROMANIPULATORS; NANOWIRES; PROBES;

NANOSTRUCTURED MATERIALS;

EID: 78349257822     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2010.2045232     Document Type: Article

References (34)

1. M. Despont, H. Takahashi, S. Ichihara, Y. Shirakawabe, N. Shimizu, A. Inoue et al., "Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging, " in Proc. 13th Ann. Int. Conf. Micro Electro Mech. Syst. (MEMS 2000), pp. 126-131.
2. M. Jaschke and H.-J. Butt, "Deposition of organic material by the tip of a scanning force microscope, " Langmuir, vol. 11, pp. 1061-1064, Feb. 1995.
3. R. D. Piner, J. Zhu, F. Xu, S. Hong, and C. A. Mirkin, "Dip pen nanolithography, " Science, vol. 283, pp. 661-663, Jan. 1999.
4. A. A. Tseng, A. Notargiacomo, and T. P. Chen, "Nanofabrication by scanning probe microscope lithography: A review, " J. Vac. Sci. Technol. B, vol. 23, pp. 877-894, May 2005.
5. S. Krämer, R. R. Fuierer, and C. B. Gorman, "Scanning probe lithography using self-assembled monolayers, " Chem. Rev., vol. 103, pp. 4367-4418, Oct. 2003.
6. S. W. Park, H. T. Soh, C. F. Quate, and S.-I. Park, "Nanometer scale lithography at high scanning speeds with the atomic force microscope using spin on glass, " Appl. Phys. Lett., vol. 67, pp. 2415-2417, Oct. 1995.
7. R. Szoszkiewicz, T. Okada, S. C. Jones, T.-D. Li, W. P. King, S. R. Marder, and E. Riedo, "High-speed, sub-15 nm feature size thermochemical nanolithography, " Nano Lett., vol. 7, pp. 1064-1069, Mar. 2007.
8. H. Sugimura and N. Nakagiri, "AFM lithography in constant current mode, " Nanotechnology, vol. 8, pp. A15-A18, 2010.
9. -2 densities, " Nanotechnology, vol. 19, pp. 395305-1-395305-6, Aug. 2008.
10. W. P. King, T. W. Kenny, K. E. Goodson, G. L. W. Cross, M. Despont, U. Dürig, H. Rothuizen, G. Binnig, and P. Vettiger, "Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation, " J. Microelectromech. Syst., vol. 11, pp. 765-774, Dec. 2002.
11. S. C. Minne, J. D. Adams, G. Yaralioglu, S. R. Manalis, A. Atalar, and C. F. Quate, "Centimeter scale atomic force microscope imaging and lithography, " Appl. Phys. Lett., vol. 73, pp. 1742-1744, Sep. 1998.
12. M. A. Lantz, D. Weismann, and B. Gotsmann, "Dynamic superlubricity and the elimination of wear on the nanoscale, " Nat. Nanotech., vol. 4, pp. 586-591, Sep. 2009.
13. B. Gotsmann and M. A. Lantz, "Atomistic wear in a single asperity sliding contact, " Phys. Rev. Lett., vol. 101, pp. 125501-1-125501-4, Sep. 2008.
14. K.-H. Chung, Y.-H. Lee, and D.-E. Kim, "Characteristics of fracture during the approach process and wear mechanism of a silicon AFM tip, " Ultramicroscopy, vol. 102, pp. 161-171, Sep. 2004.
15. T. Larsen, K. Moloni, F. Flack, M. A. Eriksson, and M. G. Lagally, "Comparison of wear characteristics of etched-silicon and carbon nanotube atomic-force microscopy probes, " Appl. Phys. Lett., vol. 80, pp. 1996-1998, Mar. 2002.
16. A. Majumdar, "Scanning thermal microscopy, " Annu. Rev. Mater. Sci., vol. 29, pp. 505-585, Aug. 1999.
17. H. M. Pollock and A. Hammiche, "Micro-thermal analysis: Techniques and applications, " J. Phys. D: Appl. Phys., vol. 34, pp. R23-R53, May 2001.
18. R. J. Colton, "Nanoscale measurements and manipulation, " J. Vac. Sci. Technol. B, vol. 22, pp. 1609-1635, Jun. 2004.
19. W. Liu and B. Yang, "Thermography techniques for integrated circuits and semiconductor devices, " Sens. Rev., vol. 27, pp. 298-309, 2007.
20. K. Edinger, T. Gotszalk, and I. W. Rangelow, "Novel high resolution scanning thermal probe, " J. Vac. Sci. Technol. B, vol. 19, pp. 2856-2860, Nov./Dec. 2001.
21. L. Shi, S. Plyasunov, A. Bachtold, P. L. McEuen, and A. Majumdar, "Scanning thermal microscopyofcarbon nanotubes using batch-fabricated probes, " Appl. Phys. Lett., vol. 77, pp. 4295-4297, Dec. 2000.
22. L. Shi, O. Kwon, A. C. Miner, and A. Majumdar, "Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy, " J. Microelectromech. Syst., vol. 10, pp. 370-378, Sep. 2001.
23. U. F. Wischnath, J. Welker, M. Munzel, and A. Kittel, "The near-field scanning thermal microscope, " Rev. Sci. Instrum., vol. 79, pp. 073708-1-073708-7, Jul. 2008.
24. A. Kittel, U. F. Wischnath, J. Welker, O. Huth, F. Rüting, and S.-A. Biehs, "Near-field thermal imaging of nanostructured surfaces, " Appl. Phys. Lett., vol. 93, pp. 193109-1-193109-3, Nov. 2008.
25. 2, " Appl. Phys. Lett., vol. 92, pp. 043122-1-043122-3, Jan. 2008.
26. U. Dürig, "Fundamentals of micromechanical thermoelectric sensors, " J. Appl. Phys., vol. 98, pp. 044906-1-044906-14, 2005.
27. A. Pantazi, A. Sebastian, T. A. Antonakopoulos, P. Bächtold, A. R. Bonaccio, J. Bonan, G. Cherubini, M. Despont et al., "Probe-based ultrahigh-density storage technology, " IBM J. Res. Dev., vol. 52, pp. 493-511, Jul./Sep. 2008.
28. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche et al., "VLSI-NEMS chip for parallel AFM data storage, " Sens. Actuators, vol. 80, pp. 100-107, 2000.
29. B. Gotsmann, M. A. Lantz, A. Knoll, and U. Dürig, "Nanoscale thermal and mechanical interactions studies using heatable probes, " in Nanotechnology, Vol. 6: Nanoprobes, H. Fuchs, Ed. Weinheim, Germany: Wiley-VCH Verlag GmbH & Co. KGaA, 2009, pp. 121-169.
30. H. Rothuizen, M. Despont, U. Drechsler, C. Hagleitner, A. Sebastian, and D. Wiesmann, "Design of power-optimized thermal cantilevers for scanning probe topography sensing, " in Proc. IEEE 22nd Int. Conf. Micro Electro Mech. Syst. (MEMS), 2009, pp. 603-606.
31. A. Sebastian and D. Wiesmann, "Modeling and experimental identification of silicon microheater dynamics: A systems approach, " J. Microelectromech. Syst., vol. 17, pp. 911-920, Aug. 2008.
32. A. Sebastian and S. M. Salapaka, "Design methodologies for robust nanopositioning, " IEEE Trans. Control Syst. Technol., vol. 13, no. 6, pp. 868-876, Nov. 2005.
33. A. Sebastian, D. Wiesmann, P. Bächtold, H. Rothuizen, M. Despont, and U. Drechsler, "Feedback enhanced thermo-electric topography sensing, " in Proc. IEEE 15th Int. Conf. Solid State Sens., Actuators Microsyst., IEEE Transducers 2009, pp. 1963-1966.
34. P. Klapetek, I. Ohlídal, and J. Buršík, "Applications of scanning thermal microscopy in the analysis of the geometry of patterned structures, " Surface Interface Anal, vol. 38, pp. 383-387, 2006.