High resolution vacuum scanning thermal microscopy of Hf O2 and Si O2

Applied Physics Letters

Volumn 92, Issue 4, 2008, Pages

  Hinz, M ^a   Marti, O ^a   Gotsmann, B ^b   Lantz, M A ^b   Durig U ^b  

^a UNIVERSITY OF ULM   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM COMPOUNDS; OPTICAL RESOLVING POWER; SCANNING TUNNELING MICROSCOPY; THERMAL CONDUCTIVITY; THERMAL EFFECTS; VACUUM APPLICATIONS;

SHARP HEATABLE TIPS; VACUUM CONDITIONS;

THIN FILMS;

EID: 38849200568     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2840186     Document Type: Article

References (16)

1. A. Majumdar, Annu. Rev. Mater. Sci. ARMSCX 0084-6600 10.1146/annurev. matsci.29.1.505 29, 505 (1999).
2. D. M. Price, M. Reading, A. Hammiche, and H. M. Pollock, Int. J. Pharm. IJPHDE 0378-5173 10.1016/S0378-5173(99)00275-6 192, 85 (1999).
3. L. Shi and A. Majumdar, J. Heat Transfer JHTRAO 0022-1481 10.1115/1.1447939 124, 329 (2002).
4. L. Shi and A. Majumdar, in Applied Scanning Probe Methods I, edited by, B. Bushan, H. Fuchs, and, S. Hosaka, (Springer, Berlin, 2006), p. 327.
5. L. Shi and A. Majumdar, Microscale Thermophys. Eng. MTENFP 1089-3954 5, 251 (2001).
6. A. Majumdar, J. Lai, M. Chandrachood, O. Nakabeoppu, and Y. Wu, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1145474 66, 3584 (1995).
7. L. Shi, S. Plyasunov, A. Bachthold, P. L. McEuen, and A. Majumdar, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1334658 77, 4295 (2000).
8. P.-O. Chapuis, J.-J. Greffet, K. Joulain, and S. Volz, Nanotechnology NNOTER 0957-4484 10.1088/0957-4484/17/12/026 17, 2978 (2006).
9. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, and P. Vettiger, Sens. Actuators, A SAAPEB 0924-4247 10.1016/S0924-4247(99)00254-X 80, 100 (2000).
10. B. Gotsmann and U. Dürig, in Applied Scanning Probe Methods II, edited by, B. Bushan, H. Fuchs, and, S. Hosaka, (Springer, Berlin, 2006), p. 215.
11. B. Gotsmann, M. A. Lantz, A. Knoll, and U. Dürig, in Nanotechnology, edited by, H. Fuchs, (Wiley-VCH, Weinheim, 2008), Vol. 2.
12. E. T. Schwartz and R. O. Pohl, Rev. Mod. Phys. RMPHAT 0034-6861 10.1103/RevModPhys.61.605 61, 605 (1989).
13. M. Villanueva-Ibanez, C. Le Luyer, S. Parola, O. Marty, and J. Mugnier, Rev. Adv. Mater. Sci. RAMSCX 1606-5131 5, 296 (2003).
14. S.-M. Lee and D. Cahill, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.363923 81, 2590 (1995).
15. S.-M. Lee and D. Cahill, Microscale Thermophys. Eng. MTENFP 1089-3954 10.1080/108939597200421 1, 47 (1997).
16. S.-M. Lee, D. Cahill, and T. H. Allen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.52.253 52, 253 (1995).