Applications of scanning thermal microscopy in the analysis of the geometry of patterned structures

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 383-387

  Klapetek, Petr ^a   Ohlídal, Ivan ^b   Buršík, Jiří ^c  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

^b MASARYK UNIVERSITY   (Czech Republic)

^c INSTITUTE OF PHYSICS OF MATERIALS   (Czech Republic)

Author keywords

Neural networks; Scanning thermal microscopy; Tip artefacts

Indexed keywords

MICROPROCESSOR CHIPS; NEURAL NETWORKS; SOLAR CELLS; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

CONTRAST IMAGES; SCANNING THERMAL MICROSCOPY; SOLAR CELL CONTACTS; TIP ARTEFACTS;

STRUCTURAL ANALYSIS;

EID: 33646549939     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2191     Document Type: Conference Paper

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