Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 126-131

  Despont, M ^a   Takahashi, H ^a   Ichihara, S ^a   Shirakawabe, Y ^a   Shimizu, N ^a   Inoue, A ^a   Haberle, W ^a   Binnig, G K ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; IMAGE QUALITY; IMAGING SYSTEMS; MICROACTUATORS; MICROSENSORS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS;

DUAL-CANTILEVER SENSORS; HIGH-RESOLUTION IMAGING; PIEZORESISTIVE STRAIN SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033724553     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)