Design of power-optimized thermal cantilevers for scanning probe topography sensing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 603-606

  Rothuizen, H ^a   Despont, M ^a   Drechsler, U ^a   Hagleitner, C ^a   Sebastian, A ^a   Wiesmann, D ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGSTROM RESOLUTION; DESIGN OPTIMIZATION; FINITE ELEMENT SIMULATIONS; SCANNING PROBES; THERMAL CANTILEVER; TOPOGRAPHY SENSING;

ENGINEERING GEOLOGY;

NANOCANTILEVERS;

EID: 65949096521     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805454     Document Type: Conference Paper

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