Feedback enhanced thermo-electric topography sensing

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1963-1966

  Sebastian, A ^a   Wiesmann, D ^a   Baechtold, P ^a   Rothuizen, H ^a   Despont, M ^a   Drechsler, U ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Micro cantilevers; Thermo electric sensing; Topography sensing

Indexed keywords

ELECTRIC SENSORS; LOW COSTS; MICRO-CANTILEVERS; SILICON CANTILEVER; TEMPERATURE-DEPENDENT CONDUCTIVITY; TOPOGRAPHY SENSING;

ACTUATORS; FEEDBACK; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS;

SOLID-STATE SENSORS;

EID: 71449108446     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285675     Document Type: Conference Paper

References (7)

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