The low pressure Cl2/O2 discharge and the role of ClO

Plasma Sources Science and Technology

Volumn 19, Issue 5, 2010, Pages

  Thorsteinsson, E G ^a   Gudmundsson, J T ^a  

^a UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78149320930     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/5/055008     Document Type: Article

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