On the plasma parameters of a planar inductive oxygen discharge

Journal of Physics D: Applied Physics

Volumn 33, Issue 11, 2000, Pages 1323-1331

  Gudmundsson, J T ^a   Marakhtanov, A M ^b   Patel, K K ^b,c   Gopinath, V P ^b,d   Lieberman, M A ^b  

^a UNIVERSITY OF ICELAND   (Iceland)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c CYPRESS SEMICONDUCTOR   (United States)

^d AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC DENSITY OF STATES; MASS SPECTROMETERS; MATHEMATICAL MODELS; MAXWELL EQUATIONS; OXYGEN; POSITIVE IONS; PROBABILITY DENSITY FUNCTION; PROBES; TEMPERATURE;

ELECTRON ENERGY PROBABILITY FUNCTION; LANGMUIR PROBES; MAXWELLIAN ELECTRON ENERGY DISTRIBUTION FUNCTIONS; PLANAR INDUCTIVE OXYGEN DISCHARGE; QUADRUPOLE MASS SPECTROMETER;

PLASMA SOURCES;

EID: 0033713770     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/11/311     Document Type: Article

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