A global (volume averaged) model of a Cl2/Ar discharge: I. Continuous power

Journal of Physics D: Applied Physics

Volumn 43, Issue 11, 2010, Pages

  Thorsteinsson, E G ^a   Gudmundsson, J T ^a  

^a UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DILUTION; ATOMIC CHLORINE; CL ATOMS; DISCHARGE CONDITIONS; DISSOCIATION FRACTIONS; HIGH DENSITY; HIGH PRESSURE; INTERMEDIATE PRESSURES; LOW PRESSURES; NEUTRAL SURFACES; PRESSURE DEPENDENCE; SURFACE LOSS; VOLUME LOSS; DUTY RATIOS; ETCHING CHARACTERISTICS; LOW FREQUENCY; MODULATION FREQUENCIES; PLASMA PARAMETER; PULSED DISCHARGE; PULSED-POWER; TEMPORAL EVOLUTION; TIME-AVERAGED;

CHEMICAL BONDS; CHLORINE; ELECTRONEGATIVITY; REFLECTIVE COATINGS; ARGON;

ARGON; POSITIVE IONS;

EID: 77749255234     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/11/115201     Document Type: Article

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