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Thin Solid Films

Volumn 403-404, Issue , 2002, Pages 139-143

Temperature improvement of the optical and electrical properties of hydrogenated nanostructured silicon thin films

(4) Hadjadj, A a Beorchia, A a Roca I Cabarrocas, P b Boufendi, L c

a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE (France)

b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

c UNIVERSITÉ D'ORLÉANS (France)

Author keywords

Electrical properties; Nanoparticles; Nanostructured silicon; Optical properties

Indexed keywords

GLOW DISCHARGES; HYDROGENATION; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA THEORY; SILANES;

NANOSTRUCTURED SILICON THIN FILMS;

THIN FILMS;

EID: 0036467820 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01566-8 Document Type: Conference Paper

Times cited : (7)

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